Lithography:
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
London
Wiley
2013
|
| Series: | ISTE
|
| Subjects: | |
| Online Access: | DE-M347 DE-861 DE-473 Volltext |
| Item Description: | 3.7.2. Thermal effect Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components |
| Physical Description: | 1 Online-Ressource (405 pages) |
| ISBN: | 9781118557662 1118557662 9781118621233 1118621239 |
Staff View
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Record in the Search Index
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| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV043395626 |
| illustrated | Not Illustrated |
| indexdate | 2024-10-31T15:00:21Z |
| institution | BVB |
| isbn | 9781118557662 1118557662 9781118621233 1118621239 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028814210 |
| oclc_num | 830161630 |
| open_access_boolean | |
| owner | DE-861 DE-M347 |
| owner_facet | DE-861 DE-M347 |
| physical | 1 Online-Ressource (405 pages) |
| psigel | ZDB-35-WIC UBG_PDA_WIC ZDB-35-WIC FHM_Einzelkauf ZDB-35-WIC FRO_PDA_WIC ZDB-35-WIC UBG_PDA_WIC |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Wiley |
| record_format | marc |
| series2 | ISTE |
| spelling | Lithography edited by Stefan Landis London Wiley 2013 1 Online-Ressource (405 pages) txt rdacontent c rdamedia cr rdacarrier ISTE 3.7.2. Thermal effect Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microlithography fast Microlithography Electronic books Landis, Stefan Sonstige oth https://onlinelibrary.wiley.com/doi/book/10.1002/9781118557662 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Lithography TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microlithography fast Microlithography |
| title | Lithography |
| title_auth | Lithography |
| title_exact_search | Lithography |
| title_full | Lithography edited by Stefan Landis |
| title_fullStr | Lithography edited by Stefan Landis |
| title_full_unstemmed | Lithography edited by Stefan Landis |
| title_short | Lithography |
| title_sort | lithography |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microlithography fast Microlithography |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Circuits / General Microlithography |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9781118557662 |
| work_keys_str_mv | AT landisstefan lithography |