Lithography:
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
London
Wiley
2013
|
| Schriftenreihe: | ISTE
|
| Schlagworte: | |
| Online-Zugang: | DE-M347 DE-861 DE-473 Volltext |
| Beschreibung: | 3.7.2. Thermal effect Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components |
| Beschreibung: | 1 Online-Ressource (405 pages) |
| ISBN: | 9781118557662 1118557662 9781118621233 1118621239 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV043395626 | ||
| 003 | DE-604 | ||
| 005 | 20241031 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 160222s2013 |||| o||u| ||||||eng d | ||
| 020 | |a 9781118557662 |c electronic bk. |9 978-1-118-55766-2 | ||
| 020 | |a 1118557662 |c electronic bk. |9 1-118-55766-2 | ||
| 020 | |a 9781118621233 |c electronic bk. |9 978-1-118-62123-3 | ||
| 020 | |a 1118621239 |c electronic bk. |9 1-118-62123-9 | ||
| 024 | 7 | |a 10.1002/9781118557662 |2 doi | |
| 035 | |a (ZDB-35-WIC)ocn830161630 | ||
| 035 | |a (OCoLC)830161630 | ||
| 035 | |a (DE-599)BVBBV043395626 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-861 |a DE-M347 | ||
| 082 | 0 | |a 621.3815/31 | |
| 245 | 1 | 0 | |a Lithography |c edited by Stefan Landis |
| 264 | 1 | |a London |b Wiley |c 2013 | |
| 300 | |a 1 Online-Ressource (405 pages) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a ISTE | |
| 500 | |a 3.7.2. Thermal effect | ||
| 500 | |a Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Circuits / General |2 bisacsh | |
| 650 | 7 | |a Microlithography |2 fast | |
| 650 | 4 | |a Microlithography | |
| 653 | |a Electronic books | ||
| 700 | 1 | |a Landis, Stefan |e Sonstige |4 oth | |
| 856 | 4 | 0 | |u https://onlinelibrary.wiley.com/doi/book/10.1002/9781118557662 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-35-WIC | ||
| 940 | 1 | |q UBG_PDA_WIC | |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-028814210 | |
| 966 | e | |u https://onlinelibrary.wiley.com/book/10.1002/9781118557662 |l DE-M347 |p ZDB-35-WIC |q FHM_Einzelkauf |x Verlag |3 Volltext | |
| 966 | e | |u https://onlinelibrary.wiley.com/doi/book/10.1002/9781118557662 |l DE-861 |p ZDB-35-WIC |q FRO_PDA_WIC |x Verlag |3 Volltext | |
| 966 | e | |u https://onlinelibrary.wiley.com/doi/book/10.1002/9781118557662 |l DE-473 |p ZDB-35-WIC |q UBG_PDA_WIC |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1814442092073582592 |
|---|---|
| adam_text | |
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV043395626 |
| collection | ZDB-35-WIC |
| ctrlnum | (ZDB-35-WIC)ocn830161630 (OCoLC)830161630 (DE-599)BVBBV043395626 |
| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nmm a2200000zc 4500</leader><controlfield tag="001">BV043395626</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20241031</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">160222s2013 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781118557662</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-1-118-55766-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1118557662</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">1-118-55766-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781118621233</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-1-118-62123-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1118621239</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">1-118-62123-9</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1002/9781118557662</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-35-WIC)ocn830161630</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)830161630</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043395626</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-861</subfield><subfield code="a">DE-M347</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/31</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Lithography</subfield><subfield code="c">edited by Stefan Landis</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">London</subfield><subfield code="b">Wiley</subfield><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (405 pages)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">ISTE</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">3.7.2. Thermal effect</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Circuits / General</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microlithography</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microlithography</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Electronic books</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Landis, Stefan</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://onlinelibrary.wiley.com/doi/book/10.1002/9781118557662</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-35-WIC</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">UBG_PDA_WIC</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028814210</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://onlinelibrary.wiley.com/book/10.1002/9781118557662</subfield><subfield code="l">DE-M347</subfield><subfield code="p">ZDB-35-WIC</subfield><subfield code="q">FHM_Einzelkauf</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://onlinelibrary.wiley.com/doi/book/10.1002/9781118557662</subfield><subfield code="l">DE-861</subfield><subfield code="p">ZDB-35-WIC</subfield><subfield code="q">FRO_PDA_WIC</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://onlinelibrary.wiley.com/doi/book/10.1002/9781118557662</subfield><subfield code="l">DE-473</subfield><subfield code="p">ZDB-35-WIC</subfield><subfield code="q">UBG_PDA_WIC</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV043395626 |
| illustrated | Not Illustrated |
| indexdate | 2024-10-31T15:00:21Z |
| institution | BVB |
| isbn | 9781118557662 1118557662 9781118621233 1118621239 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028814210 |
| oclc_num | 830161630 |
| open_access_boolean | |
| owner | DE-861 DE-M347 |
| owner_facet | DE-861 DE-M347 |
| physical | 1 Online-Ressource (405 pages) |
| psigel | ZDB-35-WIC UBG_PDA_WIC ZDB-35-WIC FHM_Einzelkauf ZDB-35-WIC FRO_PDA_WIC ZDB-35-WIC UBG_PDA_WIC |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Wiley |
| record_format | marc |
| series2 | ISTE |
| spelling | Lithography edited by Stefan Landis London Wiley 2013 1 Online-Ressource (405 pages) txt rdacontent c rdamedia cr rdacarrier ISTE 3.7.2. Thermal effect Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microlithography fast Microlithography Electronic books Landis, Stefan Sonstige oth https://onlinelibrary.wiley.com/doi/book/10.1002/9781118557662 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Lithography TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microlithography fast Microlithography |
| title | Lithography |
| title_auth | Lithography |
| title_exact_search | Lithography |
| title_full | Lithography edited by Stefan Landis |
| title_fullStr | Lithography edited by Stefan Landis |
| title_full_unstemmed | Lithography edited by Stefan Landis |
| title_short | Lithography |
| title_sort | lithography |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microlithography fast Microlithography |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Circuits / General Microlithography |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9781118557662 |
| work_keys_str_mv | AT landisstefan lithography |