Silicon technologies: ion implantation and thermal treatment
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
London
ISTE
2011
|
| Subjects: | |
| Online Access: | FRO01 UBG01 Volltext |
| Item Description: | Title from PDF title page (viewed on Feb. 28, 2013) Includes bibliographical references and index The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion |
| Physical Description: | 1 Online-Ressource |
| ISBN: | 9781118601044 1118601041 9781118601112 1118601114 9781118601143 1118601149 9781848212312 |
Staff View
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| 500 | |a Includes bibliographical references and index | ||
| 500 | |a The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion | ||
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| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Solid State |2 bisacsh | |
| 650 | 7 | |a Ion implantation |2 fast | |
| 650 | 7 | |a Semiconductor doping |2 fast | |
| 650 | 7 | |a Semiconductors / Heat treatment |2 fast | |
| 650 | 4 | |a Semiconductor doping | |
| 650 | 4 | |a Ion implantation | |
| 650 | 4 | |a Semiconductors / Heat treatment | |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:24:50Z |
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| isbn | 9781118601044 1118601041 9781118601112 1118601114 9781118601143 1118601149 9781848212312 |
| language | English |
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| physical | 1 Online-Ressource |
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| publishDate | 2011 |
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| publisher | ISTE |
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| spelling | Silicon technologies ion implantation and thermal treatment edited by Annie Baudrant London ISTE 2011 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Title from PDF title page (viewed on Feb. 28, 2013) Includes bibliographical references and index The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh Ion implantation fast Semiconductor doping fast Semiconductors / Heat treatment fast Semiconductor doping Ion implantation Semiconductors / Heat treatment Baudrant, Annie Sonstige oth https://onlinelibrary.wiley.com/doi/book/10.1002/9781118601044 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Silicon technologies ion implantation and thermal treatment TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh Ion implantation fast Semiconductor doping fast Semiconductors / Heat treatment fast Semiconductor doping Ion implantation Semiconductors / Heat treatment |
| title | Silicon technologies ion implantation and thermal treatment |
| title_auth | Silicon technologies ion implantation and thermal treatment |
| title_exact_search | Silicon technologies ion implantation and thermal treatment |
| title_full | Silicon technologies ion implantation and thermal treatment edited by Annie Baudrant |
| title_fullStr | Silicon technologies ion implantation and thermal treatment edited by Annie Baudrant |
| title_full_unstemmed | Silicon technologies ion implantation and thermal treatment edited by Annie Baudrant |
| title_short | Silicon technologies |
| title_sort | silicon technologies ion implantation and thermal treatment |
| title_sub | ion implantation and thermal treatment |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh Ion implantation fast Semiconductor doping fast Semiconductors / Heat treatment fast Semiconductor doping Ion implantation Semiconductors / Heat treatment |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Semiconductors TECHNOLOGY & ENGINEERING / Electronics / Solid State Ion implantation Semiconductor doping Semiconductors / Heat treatment |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9781118601044 |
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