Micro process engineering: fundamentals, devices, fabrication, and applications
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Bibliographic Details
Format: Electronic eBook
Language:English
Published: Weinheim Wiley-VCH ©2006
Series:Advanced micro & nanosystems 5
Subjects:
Online Access:FRO01
UBG01
Volltext
Item Description:Includes bibliographical references and index
Advanced Micro & Nanosystems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced systems from the micro and nano worlds, which together have an immense innovative application potential that opens up with control of shape and function from the atomic level right up to the visible world without any technological gaps. In this topical volume, authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of m
Physical Description:1 Online-Ressource (xxii, 507 pages)
ISBN:9783527616961
3527616969
9783527616749
3527616748

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