APA (7th ed.) Citation

(2006). Micro process engineering: Fundamentals, devices, fabrication, and applications. Wiley-VCH.

Chicago Style (17th ed.) Citation

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications. Weinheim: Wiley-VCH, 2006.

MLA (9th ed.) Citation

Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications. Wiley-VCH, 2006.

Warning: These citations may not always be 100% accurate.