Scaling issues and design of MEMS:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Chichester, West Sussex, England
John Wiley & Sons
©2007
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| Subjects: | |
| Online Access: | FRO01 UBG01 Volltext |
| Item Description: | Title from title screen (viewed on Oct. 28, 2008) Includes bibliographical references and index |
| Physical Description: | 1 Online-Ressource (xiii, 229 pages) |
| ISBN: | 9780470034071 0470034076 9780470034088 0470034084 9780470016992 047001699X |
Staff View
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:24:37Z |
| institution | BVB |
| isbn | 9780470034071 0470034076 9780470034088 0470034084 9780470016992 047001699X |
| language | English |
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| physical | 1 Online-Ressource (xiii, 229 pages) |
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| publisher | John Wiley & Sons |
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| spelling | Baglio, S. Verfasser aut Scaling issues and design of MEMS Salvatore Baglio, Salvatore Castorina, Nicolò Savalli Scaling issues and design of microelectromechanical systems Chichester, West Sussex, England John Wiley & Sons ©2007 1 Online-Ressource (xiii, 229 pages) txt rdacontent c rdamedia cr rdacarrier Title from title screen (viewed on Oct. 28, 2008) Includes bibliographical references and index TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Microelectromechanical systems / Design and construction fast Microelectromechanical systems / Design and construction Castorina, Salvatore Sonstige oth Savalli, Nicol Sonstige oth https://onlinelibrary.wiley.com/doi/book/10.1002/9780470034071 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Baglio, S. Scaling issues and design of MEMS TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Microelectromechanical systems / Design and construction fast Microelectromechanical systems / Design and construction |
| title | Scaling issues and design of MEMS |
| title_alt | Scaling issues and design of microelectromechanical systems |
| title_auth | Scaling issues and design of MEMS |
| title_exact_search | Scaling issues and design of MEMS |
| title_full | Scaling issues and design of MEMS Salvatore Baglio, Salvatore Castorina, Nicolò Savalli |
| title_fullStr | Scaling issues and design of MEMS Salvatore Baglio, Salvatore Castorina, Nicolò Savalli |
| title_full_unstemmed | Scaling issues and design of MEMS Salvatore Baglio, Salvatore Castorina, Nicolò Savalli |
| title_short | Scaling issues and design of MEMS |
| title_sort | scaling issues and design of mems |
| topic | TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Microelectromechanical systems / Design and construction fast Microelectromechanical systems / Design and construction |
| topic_facet | TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. Microelectromechanical systems / Design and construction |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9780470034071 |
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