Microsystem technology:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Weinheim
Wiley-VCH
©2001
|
| Subjects: | |
| Online Access: | FRO01 UBG01 Volltext |
| Item Description: | Includes bibliographical references (pages 465-483) and index This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating |
| Physical Description: | 1 Online-Ressource (xii, 500 pages) |
| ISBN: | 9783527613007 3527613005 9783527613014 3527613013 9783527296347 9780470035221 3527296344 |
Staff View
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| isbn | 9783527613007 3527613005 9783527613014 3527613013 9783527296347 9780470035221 3527296344 |
| language | English |
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| spelling | Menz, W. Verfasser aut Microsystem technology W. Menz, J. Mohr, O. Paul Weinheim Wiley-VCH ©2001 1 Online-Ressource (xii, 500 pages) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references (pages 465-483) and index This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectronics fast Microelectronics Systemtechnik (DE-588)4140901-2 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf (DE-588)4522595-3 Fallstudiensammlung gnd-content Mikrosystemtechnik (DE-588)4221617-5 s Systemtechnik (DE-588)4140901-2 s 1\p DE-604 Mohr, J. Sonstige oth Paul, Oliver Sonstige oth https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Menz, W. Microsystem technology TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectronics fast Microelectronics Systemtechnik (DE-588)4140901-2 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4140901-2 (DE-588)4221617-5 (DE-588)4522595-3 |
| title | Microsystem technology |
| title_auth | Microsystem technology |
| title_exact_search | Microsystem technology |
| title_full | Microsystem technology W. Menz, J. Mohr, O. Paul |
| title_fullStr | Microsystem technology W. Menz, J. Mohr, O. Paul |
| title_full_unstemmed | Microsystem technology W. Menz, J. Mohr, O. Paul |
| title_short | Microsystem technology |
| title_sort | microsystem technology |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectronics fast Microelectronics Systemtechnik (DE-588)4140901-2 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Electronics / Digital Microelectronics Systemtechnik Mikrosystemtechnik Fallstudiensammlung |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9783527613007 |
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