Holdings: Nanopositioning technologies

Nanopositioning technologies: fundamentals and applications

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Bibliographic Details
Other Authors:	Ru, Changhai (Editor), Liu, Xinyu (Editor), Sun, Yu (Editor)
Format:	Electronic eBook
Language:	English
Published:	Cham Springer [2016]
Subjects:	Engineering Engineering design Nanotechnology Control engineering Robotics Mechatronics Electronics Microelectronics Nanotechnology and Microengineering Electronics and Microelectronics, Instrumentation Control, Robotics, Mechatronics Engineering Design Ingenieurwissenschaften Servomotor Präzisionsarbeit
Online Access:	BTU01 FAB01 FAW01 FHA01 FHI01 FHN01 FHR01 FKE01 FRO01 FWS01 FWS02 UBY01 Volltext Inhaltsverzeichnis Abstract
Physical Description:	1 Online Ressource
ISBN:	9783319238531
DOI:	10.1007/978-3-319-23853-1

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MARC


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adam_text	NANOPOSITIONING TECHNOLOGIES / : 2016 TABLE OF CONTENTS / INHALTSVERZEICHNIS 1.A REVIEW OF STICK-SLIP NANOPOSITIONING ACTUATORS 2. PIEZOELECTRIC MOTOR TECHNOLOGY - A REVIEW 3.DESIGN OF HIGH-SPEED NANOPOSITIONING SYSTEMS 4.PARALLEL-KINEMATIC NANOPOSITIONING STAGES BASED ON ROBERTS MECHANISM 5.ELECTRO-MAGNETIC NANO POSITIONING 6.MODELING OF PIEZOELECTRIC-ACTUATED NANOPOSITIONING STAGES INVOLVING WITH THE HYSTERESIS 7. TRACKING CONTROL FOR NANOPOSITIONING 8.POSITION SENSORS FOR NANOPOSITIONING 9. MEMS NANOPOSITIONERS 10.CONTROL ISSUES OF MEMS NANOPOSITIONING DEVICES 11. A REVIEW OF NANOMANIPULATION IN SCANNING ELECTRON MICROSCOPES 12. NANOPOSITIONING FOR LITHOGRAPHY AND DATA STORAGE DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT. NANOPOSITIONING TECHNOLOGIES / : 2016 ABSTRACT / INHALTSTEXT THIS BOOK COVERS THE STATE-OF-THE-ART TECHNOLOGIES FOR POSITIONING WITH NANOMETER RESOLUTIONS AND ACCURACIES, PARTICULARLY THOSE BASED ON PIEZOELECTRIC ACTUATORS AND MEMS ACTUATORS. THE LATEST ADVANCES ARE DESCRIBED, INCLUDING THE DESIGN OF NANOPOSITIONING DEVICES, SENSING AND ACTUATION TECHNOLOGIES, AND CONTROL METHODS FOR NANOPOSITIONING. THIS IS AN IDEAL BOOK FOR MECHANICAL AND ELECTRICAL ENGINEERING STUDENTS AND RESEARCHERS; MICRO AND NANOTECHNOLOGY RESEARCHERS AND GRADUATE STUDENTS; AS WELL AS THOSE WORKING IN THE PRECISION INSTRUMENTATION OR SEMICONDUCTOR INDUSTRIES DIESES SCHRIFTSTUECK WURDE MASCHINELL ERZEUGT.
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isbn	9783319238531
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spellingShingle	Nanopositioning technologies fundamentals and applications Engineering Engineering design Nanotechnology Control engineering Robotics Mechatronics Electronics Microelectronics Nanotechnology and Microengineering Electronics and Microelectronics, Instrumentation Control, Robotics, Mechatronics Engineering Design Ingenieurwissenschaften Servomotor (DE-588)4077381-4 gnd Präzisionsarbeit (DE-588)4175564-9 gnd
subject_GND	(DE-588)4077381-4 (DE-588)4175564-9
title	Nanopositioning technologies fundamentals and applications
title_auth	Nanopositioning technologies fundamentals and applications
title_exact_search	Nanopositioning technologies fundamentals and applications
title_full	Nanopositioning technologies fundamentals and applications Changhai Ru, Xinyu Liu, Yu Sun editors
title_fullStr	Nanopositioning technologies fundamentals and applications Changhai Ru, Xinyu Liu, Yu Sun editors
title_full_unstemmed	Nanopositioning technologies fundamentals and applications Changhai Ru, Xinyu Liu, Yu Sun editors
title_short	Nanopositioning technologies
title_sort	nanopositioning technologies fundamentals and applications
title_sub	fundamentals and applications
topic	Engineering Engineering design Nanotechnology Control engineering Robotics Mechatronics Electronics Microelectronics Nanotechnology and Microengineering Electronics and Microelectronics, Instrumentation Control, Robotics, Mechatronics Engineering Design Ingenieurwissenschaften Servomotor (DE-588)4077381-4 gnd Präzisionsarbeit (DE-588)4175564-9 gnd
topic_facet	Engineering Engineering design Nanotechnology Control engineering Robotics Mechatronics Electronics Microelectronics Nanotechnology and Microengineering Electronics and Microelectronics, Instrumentation Control, Robotics, Mechatronics Engineering Design Ingenieurwissenschaften Servomotor Präzisionsarbeit
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work_keys_str_mv	AT ruchanghai nanopositioningtechnologiesfundamentalsandapplications AT liuxinyu nanopositioningtechnologiesfundamentalsandapplications AT sunyu nanopositioningtechnologiesfundamentalsandapplications

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