Handbook of semiconductor manufacturing technology:
Saved in:
| Other Authors: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Boca Raton [Florida]
CRC Press
[2008]
|
| Edition: | Second edition |
| Subjects: | |
| Physical Description: | 1 Online-Ressource Illustrationen, Diagramme |
| ISBN: | 1574446754 9781420017663 |
Staff View
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| 245 | 1 | 0 | |a Handbook of semiconductor manufacturing technology |c edited by Robert Doering, Yoshio Nishi |
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Record in the Search Index
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| bvnumber | BV043207300 |
| callnumber-first | T - Technology |
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| callnumber-subject | TK - Electrical and Nuclear Engineering |
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| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | Second edition |
| format | Electronic eBook |
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| id | DE-604.BV043207300 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:20:31Z |
| institution | BVB |
| isbn | 1574446754 9781420017663 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028630487 |
| oclc_num | 850372170 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | 1 Online-Ressource Illustrationen, Diagramme |
| psigel | HUB-EBS-CRCNETBASE |
| publishDate | 2008 |
| publishDateSearch | 2008 |
| publishDateSort | 2008 |
| publisher | CRC Press |
| record_format | marc |
| spelling | Handbook of semiconductor manufacturing technology edited by Robert Doering, Yoshio Nishi Second edition Boca Raton [Florida] CRC Press [2008] © 2008 1 Online-Ressource Illustrationen, Diagramme txt rdacontent c rdamedia cr rdacarrier Semiconductors / Design and construction / Handbooks, manuals, etc Semiconductor industry / Handbooks, manuals, etc Semiconductor industry Handbooks, manuals, etc Semiconductors Design and construction Handbooks, manuals, etc Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s Fertigung (DE-588)4016899-2 s 1\p DE-604 Doering, Robert 1946- (DE-588)136401767 edt Erscheint auch als Druck-Ausgabe, Hardcover 978-1-574-44675-3 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of semiconductor manufacturing technology Semiconductors / Design and construction / Handbooks, manuals, etc Semiconductor industry / Handbooks, manuals, etc Semiconductor industry Handbooks, manuals, etc Semiconductors Design and construction Handbooks, manuals, etc Halbleitertechnologie (DE-588)4158814-9 gnd Fertigung (DE-588)4016899-2 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4016899-2 |
| title | Handbook of semiconductor manufacturing technology |
| title_auth | Handbook of semiconductor manufacturing technology |
| title_exact_search | Handbook of semiconductor manufacturing technology |
| title_full | Handbook of semiconductor manufacturing technology edited by Robert Doering, Yoshio Nishi |
| title_fullStr | Handbook of semiconductor manufacturing technology edited by Robert Doering, Yoshio Nishi |
| title_full_unstemmed | Handbook of semiconductor manufacturing technology edited by Robert Doering, Yoshio Nishi |
| title_short | Handbook of semiconductor manufacturing technology |
| title_sort | handbook of semiconductor manufacturing technology |
| topic | Semiconductors / Design and construction / Handbooks, manuals, etc Semiconductor industry / Handbooks, manuals, etc Semiconductor industry Handbooks, manuals, etc Semiconductors Design and construction Handbooks, manuals, etc Halbleitertechnologie (DE-588)4158814-9 gnd Fertigung (DE-588)4016899-2 gnd |
| topic_facet | Semiconductors / Design and construction / Handbooks, manuals, etc Semiconductor industry / Handbooks, manuals, etc Semiconductor industry Handbooks, manuals, etc Semiconductors Design and construction Handbooks, manuals, etc Halbleitertechnologie Fertigung |
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