Introduction to microelectromechanical systems engineering:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Boston
Artech House
©2004
|
| Edition: | 2nd ed |
| Series: | Microelectromechanical systems series
|
| Subjects: | |
| Online Access: | FAW01 FAW02 Volltext |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | 1 Online-Ressource (xx, 283 pages) |
| ISBN: | 1580535909 1580535917 9781580535908 9781580535915 |
Staff View
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| isbn | 1580535909 1580535917 9781580535908 9781580535915 |
| language | English |
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| publishDate | 2004 |
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| series2 | Microelectromechanical systems series |
| spelling | Maluf, Nadim Verfasser aut Introduction to microelectromechanical systems engineering Nadim Maluf, Kirt Williams 2nd ed Boston Artech House ©2004 1 Online-Ressource (xx, 283 pages) txt rdacontent c rdamedia cr rdacarrier Microelectromechanical systems series Includes bibliographical references and index Microtechnology TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems cct Microelectromechanical systems fast Microelectromechanical systems Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s 1\p DE-604 MEMS (DE-588)4824724-8 s 2\p DE-604 Williams, Kirt Sonstige oth http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=113804 Aggregator Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Maluf, Nadim Introduction to microelectromechanical systems engineering Microtechnology TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems cct Microelectromechanical systems fast Microelectromechanical systems Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4039207-7 (DE-588)4824724-8 |
| title | Introduction to microelectromechanical systems engineering |
| title_auth | Introduction to microelectromechanical systems engineering |
| title_exact_search | Introduction to microelectromechanical systems engineering |
| title_full | Introduction to microelectromechanical systems engineering Nadim Maluf, Kirt Williams |
| title_fullStr | Introduction to microelectromechanical systems engineering Nadim Maluf, Kirt Williams |
| title_full_unstemmed | Introduction to microelectromechanical systems engineering Nadim Maluf, Kirt Williams |
| title_short | Introduction to microelectromechanical systems engineering |
| title_sort | introduction to microelectromechanical systems engineering |
| topic | Microtechnology TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectromechanical systems cct Microelectromechanical systems fast Microelectromechanical systems Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | Microtechnology TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Electronics / Digital Microelectromechanical systems Mikromechanik Mikroelektronik MEMS |
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