Microelectronics failure analysis desk reference (ASM International, 2011)
"ASM International, 2011, no. 09110Z"--P. 4 of cover. - Some online versions lack accompanying media packaged with the printed version
Includes bibliographical references and indexes
Section 1. Introduction -- section 2. Failure analysis process overviews -- section 3. Failure analysis topics -- section 4. Fault verification and classification -- section 5. Localization techniques -- section 6. Deprocessing and sample preparation -- section 7. Inspection -- section 8. Materials analysis -- section 9. Focused ion beam applications -- section 10. Management and reference information