Low-k nanoporous interdielectrics: materials, thin film fabrications, structures and properties
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
New York
Nova Science Publishers
c2010
|
| Series: | Nanotechnology science and technology series
|
| Subjects: | |
| Online Access: | FAW01 FAW02 Volltext |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | 1 Online-Ressource (67 p.) |
| ISBN: | 1616687495 1617283185 9781616687496 9781617283185 |
Staff View
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:18:23Z |
| institution | BVB |
| isbn | 1616687495 1617283185 9781616687496 9781617283185 |
| language | English |
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| publishDate | 2010 |
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| series2 | Nanotechnology science and technology series |
| spelling | Ree, Moonhor Verfasser aut Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Moonhor Ree, Jinhwan Yoon, and Kyuyoung Heo New York Nova Science Publishers c2010 1 Online-Ressource (67 p.) txt rdacontent c rdamedia cr rdacarrier Nanotechnology science and technology series Includes bibliographical references and index TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Dielectric films fast Interconnects (Integrated circuit technology) fast Microelectronics / Materials fast Porous materials fast Dielectric films Microelectronics Materials Porous materials Interconnects (Integrated circuit technology) Yoon, Jinhwan Sonstige oth Heo, Kyuyoung Sonstige oth http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=358325 Aggregator Volltext |
| spellingShingle | Ree, Moonhor Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Dielectric films fast Interconnects (Integrated circuit technology) fast Microelectronics / Materials fast Porous materials fast Dielectric films Microelectronics Materials Porous materials Interconnects (Integrated circuit technology) |
| title | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties |
| title_auth | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties |
| title_exact_search | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties |
| title_full | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Moonhor Ree, Jinhwan Yoon, and Kyuyoung Heo |
| title_fullStr | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Moonhor Ree, Jinhwan Yoon, and Kyuyoung Heo |
| title_full_unstemmed | Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties Moonhor Ree, Jinhwan Yoon, and Kyuyoung Heo |
| title_short | Low-k nanoporous interdielectrics |
| title_sort | low k nanoporous interdielectrics materials thin film fabrications structures and properties |
| title_sub | materials, thin film fabrications, structures and properties |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Dielectric films fast Interconnects (Integrated circuit technology) fast Microelectronics / Materials fast Porous materials fast Dielectric films Microelectronics Materials Porous materials Interconnects (Integrated circuit technology) |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Electronics / Digital Dielectric films Interconnects (Integrated circuit technology) Microelectronics / Materials Porous materials Microelectronics Materials |
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