Nanofabrication fundamentals and applications (World Scientific, 2008)
Includes bibliographical references and index
Ch. 1. Atom, molecule, and nanocluster manipulations for nanostructure fabrication using scanning probe microscopy / A.A. Tseng ... [et al.] -- ch. 2. Atomic force microscope lithography / N. Kawasegi ... [et al.] -- ch. 3. Scanning probe arrays for nanoscale imaging, sensing, and modification / C. Santschi ... [et al.] -- ch. 4. Using biomolecules for self-assembly of engineered nano-scale structures and devices / R. Mehta, J. Lund, and B.A. Parviz -- ch. 5. Nanofabrication based on self-assembled alumina templates / S. Sen and N.A. Kouklin -- ch. 6. Nanowire assembly and integration / Z. Gu and D.H. Gracias -- ch. 7. Taper-drawing fabrication of glass nanowires / L. Tong and E. Mazur -- ch. 8. Extreme ultraviolet lithography / H. Kinoshita -- ch. 9. Electron projection lithography / T. Miura ... [et al.] -- ch. 10. Electron beam direct writing / K. Yamazaki -- ch. 11. Electron beam induced deposition / K. Mitsuishi -- ch. 12. High-resolution electron-beam-induced deposition / P.A. Crozier and C.W. Hagen -- ch. 13. Focused ion beams and interaction with solids / T. Ishitani, T. Ohnishi, and T. Yaguchi -- ch. 14. Nano/microstructuring of ceramic surfaces by unconventional lithographic methods / R.C. Salvarezza and O. Azzaroni -- ch. 15. Alternative nanofabrication approaches for non-CMOS applications / C.V. Cojocaru, F. Cicoira, and F. Rosei -- ch. 16. Nanofabrication of nanoelectromechanical systems (NEMS): emerging techniques / K.L. Ekinci and J. Brugger
Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students. Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices