Microelectronics failure analysis desk reference (ASM International, 2004)
Includes bibliographical references and indexes
Introduction -- - Failure analysis process flow -- - Failure verification -- - Failure mode: failure classifications -- - Special devices -- - Non-destructive analysis techniques -- - Depackaging -- - Photon emission (electroluminescence) localization techniques -- - Microthermography -- - Laser and particle beam-based localization techniques -- - Deprocessing -- - General imaging techniques -- - Local deprocessing and imaging -- - Materials analysis techniques -- - Important topics for semiconductor devices -- - FA techniques/tools roadmaps -- - FA operation and management -- - Appendix