Silicide technology for integrated circuits:
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
London
Institution of Electrical Engineers
©2004
|
| Series: | EMIS processing series
no. 5 |
| Subjects: | |
| Online Access: | FAW01 FAW02 Volltext |
| Item Description: | Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002 Includes bibliographical references and index 1. Silicides -- an introduction / J.W. Mayer and S.S. Lau -- 2. Silicide formation / L.J. Chen -- 3. Titanium silicide technology / Z. Ma and L.H. Allen -- 4. Cobalt silicide technology / T. Kikkawa, K. Inoue and K. Imai -- 5. Nickel silicide technology / C. Lavoie, C. Detavernier and P. Besser -- 6. Light-emitting iron disilicide / L.J. Chou -- 7. Silicide contacts for Si/Ge devices / J.E. Burnette, M. Himmerlich and R.J. Nemanich -- 8. Silicide technology for SOI devices / L.P. Ren and K.N. Tu -- 9. Characterisation of metal silicides / Y.F. Hsieh, S.L. Cheng and L.J. Chen |
| Physical Description: | 1 Online-Ressource (xviii, 279 pages) |
| ISBN: | 1849190666 9781849190664 |
Staff View
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| id | DE-604.BV043098768 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:17:22Z |
| institution | BVB |
| isbn | 1849190666 9781849190664 |
| language | English |
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| physical | 1 Online-Ressource (xviii, 279 pages) |
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| publishDate | 2004 |
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| publisher | Institution of Electrical Engineers |
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| series2 | EMIS processing series |
| spelling | Silicide technology for integrated circuits edited by Lih J. Chen London Institution of Electrical Engineers ©2004 1 Online-Ressource (xviii, 279 pages) txt rdacontent c rdamedia cr rdacarrier EMIS processing series no. 5 Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002 Includes bibliographical references and index 1. Silicides -- an introduction / J.W. Mayer and S.S. Lau -- 2. Silicide formation / L.J. Chen -- 3. Titanium silicide technology / Z. Ma and L.H. Allen -- 4. Cobalt silicide technology / T. Kikkawa, K. Inoue and K. Imai -- 5. Nickel silicide technology / C. Lavoie, C. Detavernier and P. Besser -- 6. Light-emitting iron disilicide / L.J. Chou -- 7. Silicide contacts for Si/Ge devices / J.E. Burnette, M. Himmerlich and R.J. Nemanich -- 8. Silicide technology for SOI devices / L.P. Ren and K.N. Tu -- 9. Characterisation of metal silicides / Y.F. Hsieh, S.L. Cheng and L.J. Chen TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Integrated circuits / Materials fast Silicides fast Silicides Integrated circuits Materials Chen, L. J. Sonstige oth Institution of Electrical Engineers Sonstige oth Erscheint auch als Druck-Ausgabe, Hardcover 0-86341-352-8 Erscheint auch als Druck-Ausgabe, Hardcover 978-0-86341-352-0 http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=292235 Aggregator Volltext |
| spellingShingle | Silicide technology for integrated circuits TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Integrated circuits / Materials fast Silicides fast Silicides Integrated circuits Materials |
| title | Silicide technology for integrated circuits |
| title_auth | Silicide technology for integrated circuits |
| title_exact_search | Silicide technology for integrated circuits |
| title_full | Silicide technology for integrated circuits edited by Lih J. Chen |
| title_fullStr | Silicide technology for integrated circuits edited by Lih J. Chen |
| title_full_unstemmed | Silicide technology for integrated circuits edited by Lih J. Chen |
| title_short | Silicide technology for integrated circuits |
| title_sort | silicide technology for integrated circuits |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Integrated circuits / Materials fast Silicides fast Silicides Integrated circuits Materials |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Solid State TECHNOLOGY & ENGINEERING / Electronics / Semiconductors Integrated circuits / Materials Silicides Integrated circuits Materials |
| url | http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=292235 |
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