Scanning electron microscope optics and spectrometers:
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Singapore
World Scientific
©2011
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| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | Includes bibliographical references (pages 385-398) and index 1. Conventional SEM design. 1.1. Introduction to the SEM. 1.2. Basic principles of electron optics. 1.3. The electron gun. 1.4. Lens aberrations and primary beam probe size. 1.5. Deflection systems. 1.6. Quadrupole stigmators. 1.7. SEM output signals. 1.8. The emission hemisphere and BSE collection. 1.9. The scattered electron energy distribution. 1.10. The SE collection efficiency. 1.11. Specimen charging. 1.12. Elastic BSE imaging. 1.13. Selected SEM image examples -- 2. Spectrometer design principles. 2.1. Figures of merit. 2.2. The SAM and the SEM. 2.3. The retarding field analyzer. 2.4. Deflection field analyzers -- 3. In-lens improvements. 3.1. Magnetic immersion lenses. 3.2. Magnetic semi-in-lens designs. 3.3. Electric retarding field lenses. 3.4. Mixed field in-lens designs. 3.5. Selected in-lens image examples -- 4. Sub-nanometer probe diameters. 4.1. Monochromators and immersion objective lenses. 4.2. Aberration correctors. 4.3. The helium ion microscope -- 5. Secondary electron spectrometers. 5.1. Early deflection analyzers. 5.2. Retarding field analyzers. 5.3. Surface fields and signal-to-noise characteristics. 5.4. Deflection/multi-channel analyzers -- 6. Full range deflector spectrometer designs. 6.1. First-order focusing toroidal analyzers. 6.2. A second-order focusing toroidal analyzer design. 6.3. A modified fountain analyzer design -- 7. Full range parallel energy spectrometer designs. 7.1. The time-of-flight spectrometer. 7.2. A Gaussian field magnetic sector. 7.3. A round magnetic beam separator -- 8. Spectroscopic SEM proposals This book contains proposals to redesign the scanning electron microscope so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself. The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign |
| Beschreibung: | 1 Online-Ressource (xiii, 402 pages) |
| ISBN: | 9789812836670 9789812836687 9812836675 9812836683 |
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| 500 | |a Includes bibliographical references (pages 385-398) and index | ||
| 500 | |a 1. Conventional SEM design. 1.1. Introduction to the SEM. 1.2. Basic principles of electron optics. 1.3. The electron gun. 1.4. Lens aberrations and primary beam probe size. 1.5. Deflection systems. 1.6. Quadrupole stigmators. 1.7. SEM output signals. 1.8. The emission hemisphere and BSE collection. 1.9. The scattered electron energy distribution. 1.10. The SE collection efficiency. 1.11. Specimen charging. 1.12. Elastic BSE imaging. 1.13. Selected SEM image examples -- 2. Spectrometer design principles. 2.1. Figures of merit. 2.2. The SAM and the SEM. 2.3. The retarding field analyzer. 2.4. Deflection field analyzers -- 3. In-lens improvements. 3.1. Magnetic immersion lenses. 3.2. Magnetic semi-in-lens designs. 3.3. Electric retarding field lenses. 3.4. Mixed field in-lens designs. 3.5. Selected in-lens image examples -- 4. Sub-nanometer probe diameters. 4.1. Monochromators and immersion objective lenses. 4.2. Aberration correctors. 4.3. The helium ion microscope -- 5. Secondary electron spectrometers. 5.1. Early deflection analyzers. 5.2. Retarding field analyzers. 5.3. Surface fields and signal-to-noise characteristics. 5.4. Deflection/multi-channel analyzers -- 6. Full range deflector spectrometer designs. 6.1. First-order focusing toroidal analyzers. 6.2. A second-order focusing toroidal analyzer design. 6.3. A modified fountain analyzer design -- 7. Full range parallel energy spectrometer designs. 7.1. The time-of-flight spectrometer. 7.2. A Gaussian field magnetic sector. 7.3. A round magnetic beam separator -- 8. Spectroscopic SEM proposals | ||
| 500 | |a This book contains proposals to redesign the scanning electron microscope so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself. The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign | ||
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Datensatz im Suchindex
| _version_ | 1804175505993236481 |
|---|---|
| any_adam_object | |
| author | Khursheed, Anjam |
| author_facet | Khursheed, Anjam |
| author_role | aut |
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| author_variant | a k ak |
| building | Verbundindex |
| bvnumber | BV043098464 |
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| dewey-full | 681.413 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices |
| dewey-raw | 681.413 |
| dewey-search | 681.413 |
| dewey-sort | 3681.413 |
| dewey-tens | 680 - Manufacture of products for specific uses |
| discipline | Handwerk und Gewerbe / Verschiedene Technologien |
| format | Electronic eBook |
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| id | DE-604.BV043098464 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:17:22Z |
| institution | BVB |
| isbn | 9789812836670 9789812836687 9812836675 9812836683 |
| language | English |
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| oclc_num | 738433338 |
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| physical | 1 Online-Ressource (xiii, 402 pages) |
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| publishDate | 2011 |
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| publisher | World Scientific |
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| spelling | Khursheed, Anjam Verfasser aut Scanning electron microscope optics and spectrometers Anjam Khursheed Singapore World Scientific ©2011 1 Online-Ressource (xiii, 402 pages) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references (pages 385-398) and index 1. Conventional SEM design. 1.1. Introduction to the SEM. 1.2. Basic principles of electron optics. 1.3. The electron gun. 1.4. Lens aberrations and primary beam probe size. 1.5. Deflection systems. 1.6. Quadrupole stigmators. 1.7. SEM output signals. 1.8. The emission hemisphere and BSE collection. 1.9. The scattered electron energy distribution. 1.10. The SE collection efficiency. 1.11. Specimen charging. 1.12. Elastic BSE imaging. 1.13. Selected SEM image examples -- 2. Spectrometer design principles. 2.1. Figures of merit. 2.2. The SAM and the SEM. 2.3. The retarding field analyzer. 2.4. Deflection field analyzers -- 3. In-lens improvements. 3.1. Magnetic immersion lenses. 3.2. Magnetic semi-in-lens designs. 3.3. Electric retarding field lenses. 3.4. Mixed field in-lens designs. 3.5. Selected in-lens image examples -- 4. Sub-nanometer probe diameters. 4.1. Monochromators and immersion objective lenses. 4.2. Aberration correctors. 4.3. The helium ion microscope -- 5. Secondary electron spectrometers. 5.1. Early deflection analyzers. 5.2. Retarding field analyzers. 5.3. Surface fields and signal-to-noise characteristics. 5.4. Deflection/multi-channel analyzers -- 6. Full range deflector spectrometer designs. 6.1. First-order focusing toroidal analyzers. 6.2. A second-order focusing toroidal analyzer design. 6.3. A modified fountain analyzer design -- 7. Full range parallel energy spectrometer designs. 7.1. The time-of-flight spectrometer. 7.2. A Gaussian field magnetic sector. 7.3. A round magnetic beam separator -- 8. Spectroscopic SEM proposals This book contains proposals to redesign the scanning electron microscope so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself. The book is aimed at scientists, engineers and graduate students whose research area or study in some way involves the scanning electron microscope and/or charged particle spectrometers. It can be used both as an introduction to these subjects and as a guide to more advanced topics about scanning electron microscope redesign Engineering Natural history Science TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Ingenieurwissenschaften Naturwissenschaft Scanning electron microscopes Design and construction Spectrometer Design and construction Rasterelektronenmikroskop (DE-588)4124024-8 gnd rswk-swf Rasterelektronenmikroskop (DE-588)4124024-8 s 1\p DE-604 http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=374791 Aggregator Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Khursheed, Anjam Scanning electron microscope optics and spectrometers Engineering Natural history Science TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Ingenieurwissenschaften Naturwissenschaft Scanning electron microscopes Design and construction Spectrometer Design and construction Rasterelektronenmikroskop (DE-588)4124024-8 gnd |
| subject_GND | (DE-588)4124024-8 |
| title | Scanning electron microscope optics and spectrometers |
| title_auth | Scanning electron microscope optics and spectrometers |
| title_exact_search | Scanning electron microscope optics and spectrometers |
| title_full | Scanning electron microscope optics and spectrometers Anjam Khursheed |
| title_fullStr | Scanning electron microscope optics and spectrometers Anjam Khursheed |
| title_full_unstemmed | Scanning electron microscope optics and spectrometers Anjam Khursheed |
| title_short | Scanning electron microscope optics and spectrometers |
| title_sort | scanning electron microscope optics and spectrometers |
| topic | Engineering Natural history Science TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Ingenieurwissenschaften Naturwissenschaft Scanning electron microscopes Design and construction Spectrometer Design and construction Rasterelektronenmikroskop (DE-588)4124024-8 gnd |
| topic_facet | Engineering Natural history Science TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades Ingenieurwissenschaften Naturwissenschaft Scanning electron microscopes Design and construction Spectrometer Design and construction Rasterelektronenmikroskop |
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