Advanced Ta-based diffusion barriers for Cu interconnects:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
New York
Nova Science Publishers
c2009
|
| Subjects: | |
| Online Access: | FAW01 FAW02 Volltext |
| Item Description: | Includes bibliographical references (p. [73]-86) and index |
| Physical Description: | 1 Online-Ressource (93 p.) |
| ISBN: | 1607416751 9781607416753 |
Staff View
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:16:34Z |
| institution | BVB |
| isbn | 1607416751 9781607416753 |
| language | English |
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| spelling | Hübner, René Verfasser aut Advanced Ta-based diffusion barriers for Cu interconnects René Hübner New York Nova Science Publishers c2009 1 Online-Ressource (93 p.) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references (p. [73]-86) and index TECHNOLOGY & ENGINEERING / Electronics / Circuits / Integrated bisacsh TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Electrodiffusion fast Integrated circuits fast Interconnects (Integrated circuit technology) fast Interconnects (Integrated circuit technology) Integrated circuits Electrodiffusion http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=281179 Aggregator Volltext |
| spellingShingle | Hübner, René Advanced Ta-based diffusion barriers for Cu interconnects TECHNOLOGY & ENGINEERING / Electronics / Circuits / Integrated bisacsh TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Electrodiffusion fast Integrated circuits fast Interconnects (Integrated circuit technology) fast Interconnects (Integrated circuit technology) Integrated circuits Electrodiffusion |
| title | Advanced Ta-based diffusion barriers for Cu interconnects |
| title_auth | Advanced Ta-based diffusion barriers for Cu interconnects |
| title_exact_search | Advanced Ta-based diffusion barriers for Cu interconnects |
| title_full | Advanced Ta-based diffusion barriers for Cu interconnects René Hübner |
| title_fullStr | Advanced Ta-based diffusion barriers for Cu interconnects René Hübner |
| title_full_unstemmed | Advanced Ta-based diffusion barriers for Cu interconnects René Hübner |
| title_short | Advanced Ta-based diffusion barriers for Cu interconnects |
| title_sort | advanced ta based diffusion barriers for cu interconnects |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Circuits / Integrated bisacsh TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Electrodiffusion fast Integrated circuits fast Interconnects (Integrated circuit technology) fast Interconnects (Integrated circuit technology) Integrated circuits Electrodiffusion |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Circuits / Integrated TECHNOLOGY & ENGINEERING / Electronics / Circuits / General Electrodiffusion Integrated circuits Interconnects (Integrated circuit technology) |
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