APA (7th ed.) Citation

Hübner, R. (2009). Advanced Ta-based diffusion barriers for Cu interconnects. Nova Science Publishers.

Chicago Style (17th ed.) Citation

Hübner, René. Advanced Ta-based Diffusion Barriers for Cu Interconnects. New York: Nova Science Publishers, 2009.

MLA (9th ed.) Citation

Hübner, René. Advanced Ta-based Diffusion Barriers for Cu Interconnects. Nova Science Publishers, 2009.

Warning: These citations may not always be 100% accurate.