Beam technologies for integrated processing: report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Washington, D.C.
National Academy Press
1992
|
| Schlagworte: | |
| Online-Zugang: | FAW01 FAW02 Volltext |
| Beschreibung: | "NMAB-461.". - Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002 Includes bibliographical references |
| Beschreibung: | 1 Online-Ressource (xii, 89 p.) |
| ISBN: | 0309046351 0585149453 9780585149455 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV043061822 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 151126s1992 |||| o||u| ||||||eng d | ||
| 020 | |a 0309046351 |9 0-309-04635-1 | ||
| 020 | |a 0585149453 |c electronic bk. |9 0-585-14945-3 | ||
| 020 | |a 9780585149455 |c electronic bk. |9 978-0-585-14945-5 | ||
| 035 | |a (OCoLC)44965115 | ||
| 035 | |a (DE-599)BVBBV043061822 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1046 |a DE-1047 | ||
| 082 | 0 | |a 621.381 |2 20 | |
| 110 | 2 | |a National Research Council (U.S.) |b Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Beam technologies for integrated processing |b report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| 264 | 1 | |a Washington, D.C. |b National Academy Press |c 1992 | |
| 300 | |a 1 Online-Ressource (xii, 89 p.) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a "NMAB-461.". - Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002 | ||
| 500 | |a Includes bibliographical references | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Microelectronics |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Digital |2 bisacsh | |
| 650 | 7 | |a Microelectronics industry |2 fast | |
| 650 | 7 | |a Microelectronics / Materials |2 fast | |
| 650 | 7 | |a Molecular beams / Industrial applications |2 fast | |
| 650 | 7 | |a Plasma-enhanced chemical vapor deposition / Industrial applications |2 fast | |
| 650 | 4 | |a Microelectronics industry | |
| 650 | 4 | |a Molecular beams |x Industrial applications | |
| 650 | 4 | |a Microelectronics |x Materials | |
| 650 | 4 | |a Plasma-enhanced chemical vapor deposition |x Industrial applications | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druckausgabe |z 978-0-309-04635-0 |
| 856 | 4 | 0 | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=14749 |x Aggregator |3 Volltext |
| 912 | |a ZDB-4-EBA | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-028486014 | ||
| 966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=14749 |l FAW01 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
| 966 | e | |u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=14749 |l FAW02 |p ZDB-4-EBA |q FAW_PDA_EBA |x Aggregator |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804175437371277312 |
|---|---|
| any_adam_object | |
| author_corporate | National Research Council (U.S.) Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems |
| author_corporate_role | aut |
| author_facet | National Research Council (U.S.) Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems |
| author_sort | National Research Council (U.S.) Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems |
| building | Verbundindex |
| bvnumber | BV043061822 |
| collection | ZDB-4-EBA |
| ctrlnum | (OCoLC)44965115 (DE-599)BVBBV043061822 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02664nmm a2200493zc 4500</leader><controlfield tag="001">BV043061822</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">151126s1992 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0309046351</subfield><subfield code="9">0-309-04635-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0585149453</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">0-585-14945-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780585149455</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-0-585-14945-5</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)44965115</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043061822</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-1047</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">20</subfield></datafield><datafield tag="110" ind1="2" ind2=" "><subfield code="a">National Research Council (U.S.)</subfield><subfield code="b">Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Beam technologies for integrated processing</subfield><subfield code="b">report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Washington, D.C.</subfield><subfield code="b">National Academy Press</subfield><subfield code="c">1992</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (xii, 89 p.)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">"NMAB-461.". - Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Microelectronics</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Electronics / Digital</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microelectronics industry</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Microelectronics / Materials</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Molecular beams / Industrial applications</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Plasma-enhanced chemical vapor deposition / Industrial applications</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics industry</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Molecular beams</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield><subfield code="x">Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Plasma-enhanced chemical vapor deposition</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druckausgabe</subfield><subfield code="z">978-0-309-04635-0</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=14749</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-4-EBA</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-028486014</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=14749</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=14749</subfield><subfield code="l">FAW02</subfield><subfield code="p">ZDB-4-EBA</subfield><subfield code="q">FAW_PDA_EBA</subfield><subfield code="x">Aggregator</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV043061822 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:16:16Z |
| institution | BVB |
| isbn | 0309046351 0585149453 9780585149455 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-028486014 |
| oclc_num | 44965115 |
| open_access_boolean | |
| owner | DE-1046 DE-1047 |
| owner_facet | DE-1046 DE-1047 |
| physical | 1 Online-Ressource (xii, 89 p.) |
| psigel | ZDB-4-EBA ZDB-4-EBA FAW_PDA_EBA |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | National Academy Press |
| record_format | marc |
| spelling | National Research Council (U.S.) Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems Verfasser aut Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council Washington, D.C. National Academy Press 1992 1 Online-Ressource (xii, 89 p.) txt rdacontent c rdamedia cr rdacarrier "NMAB-461.". - Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002 Includes bibliographical references TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectronics industry fast Microelectronics / Materials fast Molecular beams / Industrial applications fast Plasma-enhanced chemical vapor deposition / Industrial applications fast Microelectronics industry Molecular beams Industrial applications Microelectronics Materials Plasma-enhanced chemical vapor deposition Industrial applications Erscheint auch als Druckausgabe 978-0-309-04635-0 http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=14749 Aggregator Volltext |
| spellingShingle | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectronics industry fast Microelectronics / Materials fast Molecular beams / Industrial applications fast Plasma-enhanced chemical vapor deposition / Industrial applications fast Microelectronics industry Molecular beams Industrial applications Microelectronics Materials Plasma-enhanced chemical vapor deposition Industrial applications |
| title | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_auth | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_exact_search | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_full | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_fullStr | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_full_unstemmed | Beam technologies for integrated processing report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_short | Beam technologies for integrated processing |
| title_sort | beam technologies for integrated processing report of the committee on beam technologies opportunities in attaining fully integrated processing systems national materials advisory board commission on engineering and technical systems national research council |
| title_sub | report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics bisacsh TECHNOLOGY & ENGINEERING / Electronics / Digital bisacsh Microelectronics industry fast Microelectronics / Materials fast Molecular beams / Industrial applications fast Plasma-enhanced chemical vapor deposition / Industrial applications fast Microelectronics industry Molecular beams Industrial applications Microelectronics Materials Plasma-enhanced chemical vapor deposition Industrial applications |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Microelectronics TECHNOLOGY & ENGINEERING / Electronics / Digital Microelectronics industry Microelectronics / Materials Molecular beams / Industrial applications Plasma-enhanced chemical vapor deposition / Industrial applications Molecular beams Industrial applications Microelectronics Materials Plasma-enhanced chemical vapor deposition Industrial applications |
| url | http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=14749 |
| work_keys_str_mv | AT nationalresearchcounciluscommitteeonbeamtechnologiesopportunitiesinattainingfullyintegratedprocessingsystems beamtechnologiesforintegratedprocessingreportofthecommitteeonbeamtechnologiesopportunitiesinattainingfullyintegratedprocessingsystemsnationalmaterialsadvisoryboardcommissiononengineeringandtechnicalsystemsnationalresearchcouncil |