Vaz, F. (2013). Metallic oxynitride thin films by reactive sputtering and related deposition methods: Processes, properties and applications. Bentham Science Publishers.
Chicago-Zitierstil (17. Ausg.)Vaz, Filipe. Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Processes, Properties and Applications. Sharjah: Bentham Science Publishers, 2013.
MLA-Zitierstil (9. Ausg.)Vaz, Filipe. Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Processes, Properties and Applications. Bentham Science Publishers, 2013.
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