Introduction to microsystem design:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Heidelberg [und 4 weitere]
Springer
[2015]
|
| Edition: | second edition |
| Series: | RWTHedition
|
| Subjects: | |
| Online Access: | Inhaltstext Inhaltsverzeichnis |
| Item Description: | Literaturangaben |
| Physical Description: | XXIV, 374 Seiten Illustrationen 25 cm |
| ISBN: | 9783662470220 9783662470237 |
Staff View
MARC
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| 653 | |a Microelectronics | ||
| 653 | |a Damping Constant | ||
| 653 | |a Thermal Expansion Coefficient | ||
| 653 | |a Microscopic Structures | ||
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Record in the Search Index
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| adam_text |
CONTENTS
INTRODUCTION 1
SCALING LAWS 3
ELASTIC DEFORMATIONS 5
THIN FILMS 9
EXERCISES 16
CONDUCTOR PATHS 23
EXERCISES 29
ELECTRICAL MEASUREMENTS 31
EXERCISES 42
MEMBRANES 43
EXERCISES 69
STRAIN GAUGES ON MEMBRANES 73
EXERCISES 87
BEAMS 91
EXERCISES 107
VIBRATIONS ILL
EXERCISES 128
CAPILLARIES 135
EXERCISES 156
CAPACITIVE FORCES 161
EXERCISES 173
IX
HTTP://D-NB.INFO/1068992204
X CONTENTS
PIEZOELECTRIC EFFECT 175
EXERCISES 195
THERMAL ACTUATORS 201
EXERCISES 216
MICRO OPTICS 223
EXERCISES 235
DIFFUSION 237
EXERCISES 246
MICRO VALVES 249
EXERCISES 270
MICRO PUMPS 277
EXERCISES 294
MICRO DOSING 301
ANALOGIES OF PHYSICAL DOMAINS 303
EXERCISES 309
MECHANICAL DEVICES FOR ELECTRONICS 313
EXERCISES 322
PRESSURE SENSORS 327
EXERCISES 336
FLOW SENSORS 339
EXERCISES 351
INERTIAL SENSORS 355
EXERCISES 361
LIST OF CHARACTERISTIC CURVES OF ACTUATORS 363
LIST OF CHARACTERISTIC CURVES OF SENSORS 363
TYPICAL MATERIAL PROPERTIES 364
REFERENCES 365
INDEX 371 |
| any_adam_object | 1 |
| author | Schomburg, Werner Karl 1955- |
| author_GND | (DE-588)1045948187 |
| author_facet | Schomburg, Werner Karl 1955- |
| author_role | aut |
| author_sort | Schomburg, Werner Karl 1955- |
| author_variant | w k s wk wks |
| building | Verbundindex |
| bvnumber | BV042929377 |
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| classification_tum | TEC 025f |
| ctrlnum | (OCoLC)915354003 (DE-599)DNB1068992204 |
| dewey-full | 621.0113 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.0113 |
| dewey-search | 621.0113 |
| dewey-sort | 3621.0113 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Maschinenbau / Maschinenwesen Technik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | second edition |
| format | Book |
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| isbn | 9783662470220 9783662470237 |
| language | English |
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| physical | XXIV, 374 Seiten Illustrationen 25 cm |
| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | Springer |
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| series2 | RWTHedition |
| spelling | Schomburg, Werner Karl 1955- Verfasser (DE-588)1045948187 aut Introduction to microsystem design Werner Karl Schomburg second edition Heidelberg [und 4 weitere] Springer [2015] XXIV, 374 Seiten Illustrationen 25 cm txt rdacontent n rdamedia nc rdacarrier RWTHedition Literaturangaben Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Systementwurf (DE-588)4261480-6 gnd rswk-swf Research Circuits and Systems Microelectronics Damping Constant Thermal Expansion Coefficient Microscopic Structures Mikrosystemtechnik (DE-588)4221617-5 s Systementwurf (DE-588)4261480-6 s DE-604 Erscheint auch als Online-Ausgabe Schomburg, Werner Karl Introduction to Microsystem Design X:MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=5192694&prov=M&dok_var=1&dok_ext=htm Inhaltstext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=028356234&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Schomburg, Werner Karl 1955- Introduction to microsystem design Mikrosystemtechnik (DE-588)4221617-5 gnd Systementwurf (DE-588)4261480-6 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4261480-6 |
| title | Introduction to microsystem design |
| title_auth | Introduction to microsystem design |
| title_exact_search | Introduction to microsystem design |
| title_full | Introduction to microsystem design Werner Karl Schomburg |
| title_fullStr | Introduction to microsystem design Werner Karl Schomburg |
| title_full_unstemmed | Introduction to microsystem design Werner Karl Schomburg |
| title_short | Introduction to microsystem design |
| title_sort | introduction to microsystem design |
| topic | Mikrosystemtechnik (DE-588)4221617-5 gnd Systementwurf (DE-588)4261480-6 gnd |
| topic_facet | Mikrosystemtechnik Systementwurf |
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