Papers from the 12th International Symposium on Sputtering and Plasma Processes: (ISSP 2013), 10 - 12 July 2013, Kyoto, Japan
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
2014
|
| Schriftenreihe: | Journal of vacuum science & technology : A
32,2 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zs.-Heftes |
| Beschreibung: | Getr. Zählung |
Internformat
MARC
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Datensatz im Suchindex
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| format | Conference Proceeding Book |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:08:23Z |
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| language | English |
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| oclc_num | 915787024 |
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| physical | Getr. Zählung |
| publishDate | 2014 |
| publishDateSearch | 2014 |
| publishDateSort | 2014 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology : A |
| spelling | Papers from the 12th International Symposium on Sputtering and Plasma Processes (ISSP 2013), 10 - 12 July 2013, Kyoto, Japan conference chairs: Akira Kinbara ... New York American Inst. of Physics 2014 Getr. Zählung txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : A 32,2 Einzelaufnahme eines Zs.-Heftes Sputtern (DE-588)4182614-0 gnd rswk-swf Plasmaphysik (DE-588)4046259-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2013 Kyoto gnd-content Sputtern (DE-588)4182614-0 s Plasmaphysik (DE-588)4046259-6 s DE-604 Kinbara, Akira Sonstige oth International Symposium on Sputtering and Plasma Processes 12 2013 Tokio Sonstige (DE-588)1050250044 oth |
| spellingShingle | Papers from the 12th International Symposium on Sputtering and Plasma Processes (ISSP 2013), 10 - 12 July 2013, Kyoto, Japan Sputtern (DE-588)4182614-0 gnd Plasmaphysik (DE-588)4046259-6 gnd |
| subject_GND | (DE-588)4182614-0 (DE-588)4046259-6 (DE-588)1071861417 |
| title | Papers from the 12th International Symposium on Sputtering and Plasma Processes (ISSP 2013), 10 - 12 July 2013, Kyoto, Japan |
| title_auth | Papers from the 12th International Symposium on Sputtering and Plasma Processes (ISSP 2013), 10 - 12 July 2013, Kyoto, Japan |
| title_exact_search | Papers from the 12th International Symposium on Sputtering and Plasma Processes (ISSP 2013), 10 - 12 July 2013, Kyoto, Japan |
| title_full | Papers from the 12th International Symposium on Sputtering and Plasma Processes (ISSP 2013), 10 - 12 July 2013, Kyoto, Japan conference chairs: Akira Kinbara ... |
| title_fullStr | Papers from the 12th International Symposium on Sputtering and Plasma Processes (ISSP 2013), 10 - 12 July 2013, Kyoto, Japan conference chairs: Akira Kinbara ... |
| title_full_unstemmed | Papers from the 12th International Symposium on Sputtering and Plasma Processes (ISSP 2013), 10 - 12 July 2013, Kyoto, Japan conference chairs: Akira Kinbara ... |
| title_short | Papers from the 12th International Symposium on Sputtering and Plasma Processes |
| title_sort | papers from the 12th international symposium on sputtering and plasma processes issp 2013 10 12 july 2013 kyoto japan |
| title_sub | (ISSP 2013), 10 - 12 July 2013, Kyoto, Japan |
| topic | Sputtern (DE-588)4182614-0 gnd Plasmaphysik (DE-588)4046259-6 gnd |
| topic_facet | Sputtern Plasmaphysik Konferenzschrift 2013 Kyoto |
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