Probing crystal plasticity at the nanoscales: synchrotron X-ray microdiffraction
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Singapore [u.a.]
Springer
2015
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| Series: | SpringerBriefs in applied sciences and technology
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| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | IX, 118 S. Ill., graph. Darst. |
| ISBN: | 9789812873347 |
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MARC
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| 245 | 1 | 0 | |a Probing crystal plasticity at the nanoscales |b synchrotron X-ray microdiffraction |c Arief Suriadi Budiman |
| 264 | 1 | |a Singapore [u.a.] |b Springer |c 2015 | |
| 300 | |a IX, 118 S. |b Ill., graph. Darst. | ||
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| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe |z 978-981-287-335-4 |
| 856 | 4 | 2 | |m Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027976272&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
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Record in the Search Index
| _version_ | 1804153306464911360 |
|---|---|
| adam_text | Contents^
1 Introduction............................................................. 1
1.1 Small Scale Plasticity......................................... 1
1.2 White-Beam X-ray Microdiffraction as Plasticity Probe............... 3
1.3 Electromigration in Metallic Interconnects.......................... 4
1.3.1 Electromigration Fundamentals................................ 4
1.3.2 Electromigration Degradation Mechanisms
in Cu Interconnects.......................................... 6
1.4 Size Effects in Crystalline Materials............................... 7
1.4.1 Classical Flow-Stress Relationship:
The Taylor Relation.......................................... 9
1.4.2 The Nix and Gao Model of Strain Gradient Plasticity. ... 10
References.............................................................. 11
2 Synchrotron White-Beam X-ray Microdiffraction
at the Advanced Light Source, Berkeley Lab.............................. 15
2.1 Introduction....................................................... 15
2.2 Beamline Components and Layout..................................... 16
2.3 Scanning White-Beam X-ray Microdifffaction......................... 18
2.3.1 Experimental Procedure...................................... 18
2.3.2 Data Analysis Using XMAS.................................... 20
2.4 Local Plasticity Probing Using Whitebeam pXRD..................... 28
2.4.1 Crystal Bending, Polygonization and Rotation................ 29
2.4.2 Quantitative Peak Study..................................... 31
References.............................................................. 34
3 Electromigration-Induced Plasticity in Cu Interconnects:
The Length Scale Dependence............................................. 37
3.1 Introduction....................................................... 37
3.2 Background......................................................... 38
3.3 Experimental....................................................... 39
vii
•yrjjj Contents
3.4 Results and Discussion......................................... 40
3.4.1 Micro structure of the Cu Interconnect Lines............ 40
3.4.2 Evolution of Cu Grains During Electromigration.......... 42
3.4.3 Electromigration-Induced Plasticity: The Linewidth
Effects..................................................... 44
3.4.4 Electromigration-induced Plasticity: The Directionality. . . 46
3.4.5 Correlation Between In-Plane Texture
and Occurrence of Plasticity................................ 48
3.4.6 The Out-of-Plane Crystallographic Texture
of the Cu Lines............................................. 50
3.5 Conclusions.................................................... 51
References............................................................... 52
4 Electromigration-Induced Plasticity in Cu Interconnects:
The Texture Dependence................................................... 53
4.1 Introduction................................................... 53
4.2 Background......................................................... 54
4.2.1 Electromigration-Induced Plasticity in Metallic
Interconnects............................................... 54
4.2.2 Microstructural Characterization of Cu Lines
Manufactured by AMD......................................... 55
4.2.3 Influence of Dielectrics on Mechanical Stresses
and Plastic Deformation..................................... 56
4.3 Experimental....................................................... 58
4.4 Results and Discussions............................................ 59
4.4.1 EM-Induced Plasticity: Directionality and Extent............ 59
4.4.2 Influence of Dielectrics.................................... 62
4.4.3 Proposed Correlation: Texture Versus EM-Induced
Plasticity.................................................. 63
4.5 Conclusions........................................................ 66
References............................................................... 66
5 Industrial Implications of Electromigration-Induced Plasticity
in Cu Interconnects: Plasticity-Amplified Diffusivity.................... 69
5.1 Introduction....................................................... 69
5.2 Background......................................................... 70
5.2.1 Dislocation Cores as Fast Diffusion Paths
in Metallic Interconnects................................... 70
5.2.2 Electromigration Reliability Assessment Methodology:
Black’s Law................................................. 72
5.3 Plasticity-Amplified Diffusion in Electromigration................. 73
5.3.1 Density of Core Dislocations (pcore): Extent
of Plasticity............................................... 74
5.3.2 Effect of Grain Boundary Diffusion: Effective Dcore..... 76
Contents ix
5.3.3 The Extra Dependency on J-—The Plasticity Effect........ 82
5.4 Conclusions....................................................... 84
References.............................................................. 85
6 Indentation Size Effects in Single Crystal Cu as Revealed
by Synchrotron X-ray Microdiffraction................................. 87
6.1 Introduction...................................................... 87
6.2 Background........................................................ 88
6.3 Experimental...................................................... 89
6.4 Results and Discussion............................................ 91
6.4.1 Mapping of Laue Peak Streaking on Individual
Indents.................................................... 91
6.4.2 Comparison of Laue Peak Streaking for Different
Indentation Depths......................................... 93
6.4.3 Quantitative Analysis of Laue Peak Streaking-Based
GND Density................................................ 94
6.4.4 Hardness Measurement and Revised Nix and Gao’s
GND Density................................................ 95
6.4.5 Strain Gradient Plasticity Analysis........................ 96
6.5 Conclusions..................................................... 99
References............................................................. 99
7 Smaller is Stronger: Size Effects in Uniaxially Compressed
Au Submicron Single Crystal Pillars................................... 103
7.1 Introduction..................................................... 103
7.2 Background....................................................... 104
7.3 Experimental..................................................... 105
7.3.1 Thin Film of Au on Single Crystal Cr Substrate............ 105
7.3.2 Fabrication and Uniaxial Compression of Submicron
Au Pillar................................................. 106
7.3.3 White-Beam X-ray Microdiffraction Experiment.............. 107
7.4 Results and Discussion......................... ............... 108
7.4.1 Diffraction Intensity Mapping: Pillar Location
Identification............................................ 108
7.4.2 Stress-Strain Behavior of Pillar Uniaxial Compression ... 110
7.4.3 Laue Diffraction Peak Shapes: Undeformed Versus
Deformed.................................................. 110
7.4.4 Limitation of the Technique: Quantitative Analysis
of GND Density............................................ 112
7.4.5 Dislocation Starvation and Dislocation
Nucleation-Controlled Plasticity............. 113
7.5 Conclusions...................................................... 114
References.......................................................... 115
8 Conclusions............................................................ 117
|
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| institution | BVB |
| isbn | 9789812873347 |
| language | English |
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| physical | IX, 118 S. Ill., graph. Darst. |
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| spelling | Budiman, Arief Suriadi Verfasser aut Probing crystal plasticity at the nanoscales synchrotron X-ray microdiffraction Arief Suriadi Budiman Singapore [u.a.] Springer 2015 IX, 118 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier SpringerBriefs in applied sciences and technology Ingenieurwissenschaften Crystallography Engineering Nanotechnology Surfaces (Physics) Materials Science Erscheint auch als Online-Ausgabe 978-981-287-335-4 Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027976272&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Budiman, Arief Suriadi Probing crystal plasticity at the nanoscales synchrotron X-ray microdiffraction Ingenieurwissenschaften Crystallography Engineering Nanotechnology Surfaces (Physics) Materials Science |
| title | Probing crystal plasticity at the nanoscales synchrotron X-ray microdiffraction |
| title_auth | Probing crystal plasticity at the nanoscales synchrotron X-ray microdiffraction |
| title_exact_search | Probing crystal plasticity at the nanoscales synchrotron X-ray microdiffraction |
| title_full | Probing crystal plasticity at the nanoscales synchrotron X-ray microdiffraction Arief Suriadi Budiman |
| title_fullStr | Probing crystal plasticity at the nanoscales synchrotron X-ray microdiffraction Arief Suriadi Budiman |
| title_full_unstemmed | Probing crystal plasticity at the nanoscales synchrotron X-ray microdiffraction Arief Suriadi Budiman |
| title_short | Probing crystal plasticity at the nanoscales |
| title_sort | probing crystal plasticity at the nanoscales synchrotron x ray microdiffraction |
| title_sub | synchrotron X-ray microdiffraction |
| topic | Ingenieurwissenschaften Crystallography Engineering Nanotechnology Surfaces (Physics) Materials Science |
| topic_facet | Ingenieurwissenschaften Crystallography Engineering Nanotechnology Surfaces (Physics) Materials Science |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027976272&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT budimanariefsuriadi probingcrystalplasticityatthenanoscalessynchrotronxraymicrodiffraction |