The Physics of Micro/Nano-Fabrication:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Boston, MA
Springer US
1992
|
| Series: | Microdevices, Physics and Fabrication Technologies
|
| Subjects: | |
| Online Access: | Volltext |
| Item Description: | In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references |
| Physical Description: | 1 Online-Ressource (XX, 622 p) |
| ISBN: | 9781475767759 9781441932211 |
| DOI: | 10.1007/978-1-4757-6775-9 |
Staff View
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Record in the Search Index
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| discipline | Physik |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:20:50Z |
| institution | BVB |
| isbn | 9781475767759 9781441932211 |
| language | English |
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| publishDate | 1992 |
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| publisher | Springer US |
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| series2 | Microdevices, Physics and Fabrication Technologies |
| spelling | Brodie, Ivor Verfasser aut The Physics of Micro/Nano-Fabrication edited by Ivor Brodie, Julius J. Muray Boston, MA Springer US 1992 1 Online-Ressource (XX, 622 p) txt rdacontent c rdamedia cr rdacarrier Microdevices, Physics and Fabrication Technologies In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references Physics Crystallography Computer engineering Optical materials Solid State Physics Spectroscopy and Microscopy Condensed Matter Physics Electrical Engineering Optical and Electronic Materials Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s Nanotechnologie (DE-588)4327470-5 s 1\p DE-604 Muray, Julius J. Sonstige oth https://doi.org/10.1007/978-1-4757-6775-9 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Brodie, Ivor The Physics of Micro/Nano-Fabrication Physics Crystallography Computer engineering Optical materials Solid State Physics Spectroscopy and Microscopy Condensed Matter Physics Electrical Engineering Optical and Electronic Materials Nanotechnologie (DE-588)4327470-5 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4158814-9 |
| title | The Physics of Micro/Nano-Fabrication |
| title_auth | The Physics of Micro/Nano-Fabrication |
| title_exact_search | The Physics of Micro/Nano-Fabrication |
| title_full | The Physics of Micro/Nano-Fabrication edited by Ivor Brodie, Julius J. Muray |
| title_fullStr | The Physics of Micro/Nano-Fabrication edited by Ivor Brodie, Julius J. Muray |
| title_full_unstemmed | The Physics of Micro/Nano-Fabrication edited by Ivor Brodie, Julius J. Muray |
| title_short | The Physics of Micro/Nano-Fabrication |
| title_sort | the physics of micro nano fabrication |
| topic | Physics Crystallography Computer engineering Optical materials Solid State Physics Spectroscopy and Microscopy Condensed Matter Physics Electrical Engineering Optical and Electronic Materials Nanotechnologie (DE-588)4327470-5 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Physics Crystallography Computer engineering Optical materials Solid State Physics Spectroscopy and Microscopy Condensed Matter Physics Electrical Engineering Optical and Electronic Materials Nanotechnologie Halbleitertechnologie |
| url | https://doi.org/10.1007/978-1-4757-6775-9 |
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