APA (7th ed.) Citation

Brodie, I. (1992). The Physics of Micro/Nano-Fabrication. Springer US. https://doi.org/10.1007/978-1-4757-6775-9

Chicago Style (17th ed.) Citation

Brodie, Ivor. The Physics of Micro/Nano-Fabrication. Boston, MA: Springer US, 1992. https://doi.org/10.1007/978-1-4757-6775-9.

MLA (9th ed.) Citation

Brodie, Ivor. The Physics of Micro/Nano-Fabrication. Springer US, 1992. https://doi.org/10.1007/978-1-4757-6775-9.