APA (7th ed.) Citation

Chernow, F. (1977). Ion Implantation in Semiconductors 1976. Springer US. https://doi.org/10.1007/978-1-4613-4196-3

Chicago Style (17th ed.) Citation

Chernow, Fred. Ion Implantation in Semiconductors 1976. Boston, MA: Springer US, 1977. https://doi.org/10.1007/978-1-4613-4196-3.

MLA (9th ed.) Citation

Chernow, Fred. Ion Implantation in Semiconductors 1976. Springer US, 1977. https://doi.org/10.1007/978-1-4613-4196-3.