Principles of physical vapor deposition of thin films:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Amsterdam
Elsevier
2006
|
| Edition: | 1st ed |
| Subjects: | |
| Online Access: | Volltext |
| Item Description: | The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. Offers detailed derivation of important formulae. Thoroughly covers the basic principles of materials science that are important to any thin film preparation. Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text Includes bibliographical references and index |
| Physical Description: | 1 Online-Ressource (xi, 1160 pages) |
| ISBN: | 9780080446998 008044699X 9780080480312 0080480314 |
Staff View
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| 245 | 1 | 0 | |a Principles of physical vapor deposition of thin films |c K.S. Sree Harsha |
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| 500 | |a The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. Offers detailed derivation of important formulae. Thoroughly covers the basic principles of materials science that are important to any thin film preparation. Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text | ||
| 500 | |a Includes bibliographical references and index | ||
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| 650 | 4 | |a Thin films | |
| 650 | 4 | |a Vapor-plating | |
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Record in the Search Index
| _version_ | 1804152913104207872 |
|---|---|
| any_adam_object | |
| author | SreeHarsha, K. S. |
| author_facet | SreeHarsha, K. S. |
| author_role | aut |
| author_sort | SreeHarsha, K. S. |
| author_variant | k s s ks kss |
| building | Verbundindex |
| bvnumber | BV042317073 |
| collection | ZDB-33-ESD ZDB-33-EBS |
| ctrlnum | (OCoLC)162568390 (DE-599)BVBBV042317073 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1st ed |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:18:16Z |
| institution | BVB |
| isbn | 9780080446998 008044699X 9780080480312 0080480314 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027754064 |
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| physical | 1 Online-Ressource (xi, 1160 pages) |
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| publishDate | 2006 |
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| spelling | SreeHarsha, K. S. Verfasser aut Principles of physical vapor deposition of thin films K.S. Sree Harsha 1st ed Amsterdam Elsevier 2006 1 Online-Ressource (xi, 1160 pages) txt rdacontent c rdamedia cr rdacarrier The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. Offers detailed derivation of important formulae. Thoroughly covers the basic principles of materials science that are important to any thin film preparation. Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text Includes bibliographical references and index Couches minces Dépôt en phase vapeur TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Thin films Vapor-plating Dünne Schicht (DE-588)4136925-7 gnd rswk-swf PVD-Verfahren (DE-588)4115673-0 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s PVD-Verfahren (DE-588)4115673-0 s 1\p DE-604 http://www.sciencedirect.com/science/book/9780080446998 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | SreeHarsha, K. S. Principles of physical vapor deposition of thin films Couches minces Dépôt en phase vapeur TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Thin films Vapor-plating Dünne Schicht (DE-588)4136925-7 gnd PVD-Verfahren (DE-588)4115673-0 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4115673-0 |
| title | Principles of physical vapor deposition of thin films |
| title_auth | Principles of physical vapor deposition of thin films |
| title_exact_search | Principles of physical vapor deposition of thin films |
| title_full | Principles of physical vapor deposition of thin films K.S. Sree Harsha |
| title_fullStr | Principles of physical vapor deposition of thin films K.S. Sree Harsha |
| title_full_unstemmed | Principles of physical vapor deposition of thin films K.S. Sree Harsha |
| title_short | Principles of physical vapor deposition of thin films |
| title_sort | principles of physical vapor deposition of thin films |
| topic | Couches minces Dépôt en phase vapeur TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Thin films Vapor-plating Dünne Schicht (DE-588)4136925-7 gnd PVD-Verfahren (DE-588)4115673-0 gnd |
| topic_facet | Couches minces Dépôt en phase vapeur TECHNOLOGY & ENGINEERING / Electronics / Solid State TECHNOLOGY & ENGINEERING / Electronics / Semiconductors Thin films Vapor-plating Dünne Schicht PVD-Verfahren |
| url | http://www.sciencedirect.com/science/book/9780080446998 |
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