APA (7th ed.) Citation

International Conference on Rapid Thermal Processing for Future Semiconductor Devices < 2001, Ise-Shima, Mie, Japan>. (2003). Rapid thermal processing for future semiconductor devices: Proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001. Elsevier.

Chicago Style (17th ed.) Citation

International Conference on Rapid Thermal Processing for Future Semiconductor Devices < 2001, Ise-Shima, Mie, Japan>. Rapid Thermal Processing for Future Semiconductor Devices: Proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), Held at Ise-Shima, Mie, Japan, November 14-16, 2001. Amsterdam: Elsevier, 2003.

MLA (9th ed.) Citation

International Conference on Rapid Thermal Processing for Future Semiconductor Devices < 2001, Ise-Shima, Mie, Japan>. Rapid Thermal Processing for Future Semiconductor Devices: Proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), Held at Ise-Shima, Mie, Japan, November 14-16, 2001. Elsevier, 2003.