Thin film growth: physics, materials science and applications
Gespeichert in:
Format: | Elektronisch E-Book |
---|---|
Sprache: | English |
Veröffentlicht: |
Oxford
Woodhead Pub Ltd.
c2011
|
Schriftenreihe: | Woodhead Publishing in materials
|
Schlagworte: | |
Online-Zugang: | Volltext |
Beschreibung: | Includes bibliographical references and index Thin film technology is used in many applications such as microelectronics, optics, hard and corrosion resistant coatings and micromechanics, and thin films form a uniquely versatile material base for the development of novel technologies within these industries. Thin film growth provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin films. Part one focuses on the theory of thin film growth, with chapters covering nucleation and growth processes in thin films, phase-field modelling of thin film growth and surface roughness evolution. Part two covers some of the techniques used for thin film growth, including oblique angle deposition, reactive magnetron sputtering and epitaxial growth of graphene films on single crystal metal surfaces. This section also includes chapters on the properties of thin films, covering topics such as substrate plasticity and buckling of thin films, polarity control, nanostructure growth dynamics and network behaviour in thin films. With its distinguished editor and international team of contributors, Thin film growth is an essential reference for engineers in electronics, energy materials and mechanical engineering, as well as those with an academic research interest in the topic. Provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin filmsFocusses on the theory and modelling of thin film growth, techniques and mechanisms used for thin film growth and properties of thin filmsAn essential reference for engineers in electronics, energy materials and mechanical engineering |
Beschreibung: | 1 Online-Ressource (xvi, 416 p.) |
ISBN: | 0857093290 9780857093295 9781845697365 1845697367 |
Internformat
MARC
LEADER | 00000nmm a2200000zc 4500 | ||
---|---|---|---|
001 | BV042316735 | ||
003 | DE-604 | ||
005 | 00000000000000.0 | ||
007 | cr|uuu---uuuuu | ||
008 | 150129s2011 |||| o||u| ||||||eng d | ||
020 | |a 0857093290 |c electronic bk. |9 0-85709-329-0 | ||
020 | |a 9780857093295 |c electronic bk. |9 978-0-85709-329-5 | ||
020 | |a 9781845697365 |9 978-1-84569-736-5 | ||
020 | |a 1845697367 |9 1-84569-736-7 | ||
035 | |a (ZDB-33-EBS)ocn827454897 | ||
035 | |a (OCoLC)827454897 | ||
035 | |a (DE-599)BVBBV042316735 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
049 | |a DE-1046 | ||
082 | 0 | |a 621.38152 |2 23 | |
245 | 1 | 0 | |a Thin film growth |b physics, materials science and applications |c edited by Zexian Cao |
264 | 1 | |a Oxford |b Woodhead Pub Ltd. |c c2011 | |
300 | |a 1 Online-Ressource (xvi, 416 p.) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
490 | 0 | |a Woodhead Publishing in materials | |
500 | |a Includes bibliographical references and index | ||
500 | |a Thin film technology is used in many applications such as microelectronics, optics, hard and corrosion resistant coatings and micromechanics, and thin films form a uniquely versatile material base for the development of novel technologies within these industries. Thin film growth provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin films. Part one focuses on the theory of thin film growth, with chapters covering nucleation and growth processes in thin films, phase-field modelling of thin film growth and surface roughness evolution. Part two covers some of the techniques used for thin film growth, including oblique angle deposition, reactive magnetron sputtering and epitaxial growth of graphene films on single crystal metal surfaces. This section also includes chapters on the properties of thin films, covering topics such as substrate plasticity and buckling of thin films, polarity control, nanostructure growth dynamics and network behaviour in thin films. With its distinguished editor and international team of contributors, Thin film growth is an essential reference for engineers in electronics, energy materials and mechanical engineering, as well as those with an academic research interest in the topic. Provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin filmsFocusses on the theory and modelling of thin film growth, techniques and mechanisms used for thin film growth and properties of thin filmsAn essential reference for engineers in electronics, energy materials and mechanical engineering | ||
650 | 7 | |a Thin films |2 fast | |
650 | 4 | |a Thin films | |
650 | 0 | 7 | |a Inselschicht |0 (DE-588)4342732-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
653 | |a Electronic books | ||
689 | 0 | 0 | |a Inselschicht |0 (DE-588)4342732-7 |D s |
689 | 0 | |8 1\p |5 DE-604 | |
689 | 1 | 0 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
689 | 1 | |8 2\p |5 DE-604 | |
700 | 1 | |a Cao, Zexian |e Sonstige |4 oth | |
856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9781845697365 |x Verlag |3 Volltext |
912 | |a ZDB-33-ESD |a ZDB-33-EBS | ||
940 | 1 | |q FAW_PDA_ESD | |
940 | 1 | |q FLA_PDA_ESD | |
999 | |a oai:aleph.bib-bvb.de:BVB01-027753726 | ||
883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk |
Datensatz im Suchindex
_version_ | 1804152912437313536 |
---|---|
any_adam_object | |
building | Verbundindex |
bvnumber | BV042316735 |
collection | ZDB-33-ESD ZDB-33-EBS |
ctrlnum | (ZDB-33-EBS)ocn827454897 (OCoLC)827454897 (DE-599)BVBBV042316735 |
dewey-full | 621.38152 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.38152 |
dewey-search | 621.38152 |
dewey-sort | 3621.38152 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03502nmm a2200529zc 4500</leader><controlfield tag="001">BV042316735</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">150129s2011 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0857093290</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">0-85709-329-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780857093295</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-0-85709-329-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781845697365</subfield><subfield code="9">978-1-84569-736-5</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1845697367</subfield><subfield code="9">1-84569-736-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-EBS)ocn827454897</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)827454897</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042316735</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.38152</subfield><subfield code="2">23</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Thin film growth</subfield><subfield code="b">physics, materials science and applications</subfield><subfield code="c">edited by Zexian Cao</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford</subfield><subfield code="b">Woodhead Pub Ltd.</subfield><subfield code="c">c2011</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (xvi, 416 p.)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Woodhead Publishing in materials</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Thin film technology is used in many applications such as microelectronics, optics, hard and corrosion resistant coatings and micromechanics, and thin films form a uniquely versatile material base for the development of novel technologies within these industries. Thin film growth provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin films. Part one focuses on the theory of thin film growth, with chapters covering nucleation and growth processes in thin films, phase-field modelling of thin film growth and surface roughness evolution. Part two covers some of the techniques used for thin film growth, including oblique angle deposition, reactive magnetron sputtering and epitaxial growth of graphene films on single crystal metal surfaces. This section also includes chapters on the properties of thin films, covering topics such as substrate plasticity and buckling of thin films, polarity control, nanostructure growth dynamics and network behaviour in thin films. With its distinguished editor and international team of contributors, Thin film growth is an essential reference for engineers in electronics, energy materials and mechanical engineering, as well as those with an academic research interest in the topic. Provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin filmsFocusses on the theory and modelling of thin film growth, techniques and mechanisms used for thin film growth and properties of thin filmsAn essential reference for engineers in electronics, energy materials and mechanical engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Thin films</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thin films</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Inselschicht</subfield><subfield code="0">(DE-588)4342732-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Electronic books</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Inselschicht</subfield><subfield code="0">(DE-588)4342732-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Cao, Zexian</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9781845697365</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FAW_PDA_ESD</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FLA_PDA_ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027753726</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection> |
id | DE-604.BV042316735 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T01:18:15Z |
institution | BVB |
isbn | 0857093290 9780857093295 9781845697365 1845697367 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027753726 |
oclc_num | 827454897 |
open_access_boolean | |
owner | DE-1046 |
owner_facet | DE-1046 |
physical | 1 Online-Ressource (xvi, 416 p.) |
psigel | ZDB-33-ESD ZDB-33-EBS FAW_PDA_ESD FLA_PDA_ESD |
publishDate | 2011 |
publishDateSearch | 2011 |
publishDateSort | 2011 |
publisher | Woodhead Pub Ltd. |
record_format | marc |
series2 | Woodhead Publishing in materials |
spelling | Thin film growth physics, materials science and applications edited by Zexian Cao Oxford Woodhead Pub Ltd. c2011 1 Online-Ressource (xvi, 416 p.) txt rdacontent c rdamedia cr rdacarrier Woodhead Publishing in materials Includes bibliographical references and index Thin film technology is used in many applications such as microelectronics, optics, hard and corrosion resistant coatings and micromechanics, and thin films form a uniquely versatile material base for the development of novel technologies within these industries. Thin film growth provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin films. Part one focuses on the theory of thin film growth, with chapters covering nucleation and growth processes in thin films, phase-field modelling of thin film growth and surface roughness evolution. Part two covers some of the techniques used for thin film growth, including oblique angle deposition, reactive magnetron sputtering and epitaxial growth of graphene films on single crystal metal surfaces. This section also includes chapters on the properties of thin films, covering topics such as substrate plasticity and buckling of thin films, polarity control, nanostructure growth dynamics and network behaviour in thin films. With its distinguished editor and international team of contributors, Thin film growth is an essential reference for engineers in electronics, energy materials and mechanical engineering, as well as those with an academic research interest in the topic. Provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin filmsFocusses on the theory and modelling of thin film growth, techniques and mechanisms used for thin film growth and properties of thin filmsAn essential reference for engineers in electronics, energy materials and mechanical engineering Thin films fast Thin films Inselschicht (DE-588)4342732-7 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Electronic books Inselschicht (DE-588)4342732-7 s 1\p DE-604 Dünne Schicht (DE-588)4136925-7 s 2\p DE-604 Cao, Zexian Sonstige oth http://www.sciencedirect.com/science/book/9781845697365 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Thin film growth physics, materials science and applications Thin films fast Thin films Inselschicht (DE-588)4342732-7 gnd Dünne Schicht (DE-588)4136925-7 gnd |
subject_GND | (DE-588)4342732-7 (DE-588)4136925-7 |
title | Thin film growth physics, materials science and applications |
title_auth | Thin film growth physics, materials science and applications |
title_exact_search | Thin film growth physics, materials science and applications |
title_full | Thin film growth physics, materials science and applications edited by Zexian Cao |
title_fullStr | Thin film growth physics, materials science and applications edited by Zexian Cao |
title_full_unstemmed | Thin film growth physics, materials science and applications edited by Zexian Cao |
title_short | Thin film growth |
title_sort | thin film growth physics materials science and applications |
title_sub | physics, materials science and applications |
topic | Thin films fast Thin films Inselschicht (DE-588)4342732-7 gnd Dünne Schicht (DE-588)4136925-7 gnd |
topic_facet | Thin films Inselschicht Dünne Schicht |
url | http://www.sciencedirect.com/science/book/9781845697365 |
work_keys_str_mv | AT caozexian thinfilmgrowthphysicsmaterialsscienceandapplications |