New approaches to image processing based failure analysis of nano-scale ULSI devices:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Oxford
William Andrew
2014
|
| Series: | Micro & nano technologies
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| Subjects: | |
| Online Access: | Volltext |
| Item Description: | New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise Includes bibliographical references |
| Physical Description: | 1 Online-Ressource (179 pages) |
| ISBN: | 9780323241434 0323241433 9780128000175 0128000171 |
Staff View
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| spelling | Zalevsky, Zeev Verfasser aut New approaches to image processing based failure analysis of nano-scale ULSI devices Zeev Zalevsky, Pavel Livshits, Eran Gur Oxford William Andrew 2014 1 Online-Ressource (179 pages) txt rdacontent c rdamedia cr rdacarrier Micro & nano technologies New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise Includes bibliographical references Molecular electronics Nano-Electronics Nanotechnology TECHNOLOGY & ENGINEERING / Mechanical bisacsh Integrated circuits / Ultra large scale integration / Testing fast Microelectronics fast Nanoelectronics fast Integrated circuits Ultra large scale integration Testing Nanoelectronics Microelectronics ULSI (DE-588)4226286-0 gnd rswk-swf Bildverarbeitung (DE-588)4006684-8 gnd rswk-swf Schadensanalyse (DE-588)4130826-8 gnd rswk-swf ULSI (DE-588)4226286-0 s Schadensanalyse (DE-588)4130826-8 s Bildverarbeitung (DE-588)4006684-8 s 1\p DE-604 Livshits, Pavel Sonstige oth Gur, Eran Sonstige oth http://www.sciencedirect.com/science/book/9780323241434 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Zalevsky, Zeev New approaches to image processing based failure analysis of nano-scale ULSI devices Molecular electronics Nano-Electronics Nanotechnology TECHNOLOGY & ENGINEERING / Mechanical bisacsh Integrated circuits / Ultra large scale integration / Testing fast Microelectronics fast Nanoelectronics fast Integrated circuits Ultra large scale integration Testing Nanoelectronics Microelectronics ULSI (DE-588)4226286-0 gnd Bildverarbeitung (DE-588)4006684-8 gnd Schadensanalyse (DE-588)4130826-8 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)4006684-8 (DE-588)4130826-8 |
| title | New approaches to image processing based failure analysis of nano-scale ULSI devices |
| title_auth | New approaches to image processing based failure analysis of nano-scale ULSI devices |
| title_exact_search | New approaches to image processing based failure analysis of nano-scale ULSI devices |
| title_full | New approaches to image processing based failure analysis of nano-scale ULSI devices Zeev Zalevsky, Pavel Livshits, Eran Gur |
| title_fullStr | New approaches to image processing based failure analysis of nano-scale ULSI devices Zeev Zalevsky, Pavel Livshits, Eran Gur |
| title_full_unstemmed | New approaches to image processing based failure analysis of nano-scale ULSI devices Zeev Zalevsky, Pavel Livshits, Eran Gur |
| title_short | New approaches to image processing based failure analysis of nano-scale ULSI devices |
| title_sort | new approaches to image processing based failure analysis of nano scale ulsi devices |
| topic | Molecular electronics Nano-Electronics Nanotechnology TECHNOLOGY & ENGINEERING / Mechanical bisacsh Integrated circuits / Ultra large scale integration / Testing fast Microelectronics fast Nanoelectronics fast Integrated circuits Ultra large scale integration Testing Nanoelectronics Microelectronics ULSI (DE-588)4226286-0 gnd Bildverarbeitung (DE-588)4006684-8 gnd Schadensanalyse (DE-588)4130826-8 gnd |
| topic_facet | Molecular electronics Nano-Electronics Nanotechnology TECHNOLOGY & ENGINEERING / Mechanical Integrated circuits / Ultra large scale integration / Testing Microelectronics Nanoelectronics Integrated circuits Ultra large scale integration Testing ULSI Bildverarbeitung Schadensanalyse |
| url | http://www.sciencedirect.com/science/book/9780323241434 |
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