Optical characterization of semiconductors infrared, Raman, and photoluminescence spectroscopy - Perkowitz, S. (Academic Press, 1993)
Includes bibliographical references (pages 207-215) and index
Today's complex and varied semiconductor microstructures are difficult to characterize for devices, or to provide feedback to materials makers for better materials. Optical methods are one of the best means of characterization; they require no contacts and do not damage samples, they measure a variety of properties, and they work for bulk or layered structures made of elemental, binary, or ternary semiconductors
There are several useful optical approaches which operate at different wavelengths. In the past this meant it was difficult to find the best method for a given characterization need. Now, it is possible to learn techniques and select approaches from Optical Characterization of Semiconductors, the first book to explain, illustrate, and compare the most widely used methods: photoluminescence, infrared spectroscopy, and Raman scattering
Written with non-experts in mind, the book assumes no special knowledge of semiconductors or optics, but develops the background needed to understand the why and how of each technique
Each method is illustrated with dozens of case studies taken from current literature, which address specific problems in silicon, GaAs, Al[subscript x]Ga[subscript 1-x]As, and other widely-used materials. This library of uses, arranged by property evaluated (such as impurity type, resistivity, and layer thickness) is valuable even for those familiar with optical methods