Fundamental principles of engineering nanometrology:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Oxford
William Andrew
2010
|
| Edition: | First edition |
| Series: | Micro & nano technologies
|
| Subjects: | |
| Online Access: | Volltext Volltext |
| Item Description: | Includes bibliographical references and index Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. This new edition of Fundamental Principles of Engineering Nanometrology provides a road map and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale, from the fundamentals of precision measurement, to different measurement and characterization techniques. This book is an essential guide for the emerging nanomanufacturing and nanofabrication sectors, where measurement and standardization requirements are paramount both in product specification and quality assurance. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections covering, for example, new technologies in scanning probe and e-beam microscopy (including DLS, NTA), recent developments in interferometry, and advances in co-ordinate metrology |
| Physical Description: | 1 Online-Ressource (xxvi, 321 pages) |
| ISBN: | 9781455777532 1455777536 9780080964546 0080964540 |
Staff View
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| edition | First edition |
| format | Electronic eBook |
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| isbn | 9781455777532 1455777536 9780080964546 0080964540 |
| language | English |
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| spelling | Leach, R. K. Verfasser aut Fundamental principles of engineering nanometrology by Richard K. Leach First edition Oxford William Andrew 2010 1 Online-Ressource (xxvi, 321 pages) txt rdacontent c rdamedia cr rdacarrier Micro & nano technologies Includes bibliographical references and index Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. This new edition of Fundamental Principles of Engineering Nanometrology provides a road map and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale, from the fundamentals of precision measurement, to different measurement and characterization techniques. This book is an essential guide for the emerging nanomanufacturing and nanofabrication sectors, where measurement and standardization requirements are paramount both in product specification and quality assurance. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections covering, for example, new technologies in scanning probe and e-beam microscopy (including DLS, NTA), recent developments in interferometry, and advances in co-ordinate metrology Metrologie swd Nanostruktur swd Nanotechnologie swd Metrology fast Microtechnology fast Nanotechnology fast Nanotechnologies eclas Métrologie eclas Nanotechnology Microtechnology Metrology Nanostruktur (DE-588)4204530-7 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Metrologie (DE-588)4169749-2 gnd rswk-swf Nanostruktur (DE-588)4204530-7 s Nanotechnologie (DE-588)4327470-5 s Metrologie (DE-588)4169749-2 s 1\p DE-604 http://www.sciencedirect.com/science/book/9781455777532 Verlag Volltext http://www.sciencedirect.com/science/book/9780080964546 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Leach, R. K. Fundamental principles of engineering nanometrology Metrologie swd Nanostruktur swd Nanotechnologie swd Metrology fast Microtechnology fast Nanotechnology fast Nanotechnologies eclas Métrologie eclas Nanotechnology Microtechnology Metrology Nanostruktur (DE-588)4204530-7 gnd Nanotechnologie (DE-588)4327470-5 gnd Metrologie (DE-588)4169749-2 gnd |
| subject_GND | (DE-588)4204530-7 (DE-588)4327470-5 (DE-588)4169749-2 |
| title | Fundamental principles of engineering nanometrology |
| title_auth | Fundamental principles of engineering nanometrology |
| title_exact_search | Fundamental principles of engineering nanometrology |
| title_full | Fundamental principles of engineering nanometrology by Richard K. Leach |
| title_fullStr | Fundamental principles of engineering nanometrology by Richard K. Leach |
| title_full_unstemmed | Fundamental principles of engineering nanometrology by Richard K. Leach |
| title_short | Fundamental principles of engineering nanometrology |
| title_sort | fundamental principles of engineering nanometrology |
| topic | Metrologie swd Nanostruktur swd Nanotechnologie swd Metrology fast Microtechnology fast Nanotechnology fast Nanotechnologies eclas Métrologie eclas Nanotechnology Microtechnology Metrology Nanostruktur (DE-588)4204530-7 gnd Nanotechnologie (DE-588)4327470-5 gnd Metrologie (DE-588)4169749-2 gnd |
| topic_facet | Metrologie Nanostruktur Nanotechnologie Metrology Microtechnology Nanotechnology Nanotechnologies Métrologie |
| url | http://www.sciencedirect.com/science/book/9781455777532 http://www.sciencedirect.com/science/book/9780080964546 |
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