APA (7th ed.) Citation

(1991). Handbook of VLSI microlithography: Principles, technology, and applications. Noyes Publications.

Chicago Style (17th ed.) Citation

Handbook of VLSI Microlithography: Principles, Technology, and Applications. Park Ridge, N.J., U.S.A: Noyes Publications, 1991.

MLA (9th ed.) Citation

Handbook of VLSI Microlithography: Principles, Technology, and Applications. Noyes Publications, 1991.

Warning: These citations may not always be 100% accurate.