The Materials Science of Thin Films:
Gespeichert in:
1. Verfasser: | |
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Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
San Diego
Academic Press [Imprint]
Dec. 1991
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Schlagworte: | |
Online-Zugang: | FHI01 Volltext |
Beschreibung: | This is the first available textbook to provide comprehensive coverage of the science and technology of thin films and coatings. Developed for upper-level undergraduate and beginning graduate students, the book discusses physical and chemical vapor deposition processes; phenomena involving nucleation and growth, stress, diffusion and reaction; structural and chemical characterization techniques; and applications involving coatings, magnetic and optical recording materials, integrated optics, and quantum devices. The book includes chapters on epitaxy and surface modification in addition to discussing emerging technologies such as diamond films and high Tc superconductors. Complete problem sets are provided at the end of each chapter to facilitate self-study. Key Features * The first true textbook to provide broad coverage of thin films from processing to performance * Covers film materials used in microelectronics, magnetic applications, optics, and metallurgical and protective coatings * Includes chapters on epitaxy, surface modification using laser and ion beams, and emerging thin film materials and applications * Extensive treatment is given to chemical vapor deposition, diffusion and reactions, and stress in films * Provides complete exercise sets to facilitate study |
Beschreibung: | 1 Online-Ressource (1 online resource) |
ISBN: | 9780080511184 008051118X 9780125249904 012524990X |
DOI: | 10.1016/C2009-0-22199-4 |
Internformat
MARC
LEADER | 00000nmm a2200000zc 4500 | ||
---|---|---|---|
001 | BV042307775 | ||
003 | DE-604 | ||
005 | 20220728 | ||
007 | cr|uuu---uuuuu | ||
008 | 150129s1991 |||| o||u| ||||||eng d | ||
020 | |a 9780080511184 |c electronic bk. |9 978-0-08-051118-4 | ||
020 | |a 008051118X |c electronic bk. |9 0-08-051118-X | ||
020 | |a 9780125249904 |9 978-0-12-524990-4 | ||
020 | |a 012524990X |9 0-12-524990-X | ||
024 | 7 | |a 10.1016/C2009-0-22199-4 |2 doi | |
035 | |a (OCoLC)65196181 | ||
035 | |a (DE-599)BVBBV042307775 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
049 | |a DE-1046 |a DE-573 | ||
082 | 0 | |a 620.44 |2 20 | |
084 | |a UP 7500 |0 (DE-625)146433: |2 rvk | ||
100 | 1 | |a Ohring, Milton |e Verfasser |4 aut | |
245 | 1 | 0 | |a The Materials Science of Thin Films |
264 | 1 | |a San Diego |b Academic Press [Imprint] |c Dec. 1991 | |
300 | |a 1 Online-Ressource (1 online resource) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
500 | |a This is the first available textbook to provide comprehensive coverage of the science and technology of thin films and coatings. Developed for upper-level undergraduate and beginning graduate students, the book discusses physical and chemical vapor deposition processes; phenomena involving nucleation and growth, stress, diffusion and reaction; structural and chemical characterization techniques; and applications involving coatings, magnetic and optical recording materials, integrated optics, and quantum devices. The book includes chapters on epitaxy and surface modification in addition to discussing emerging technologies such as diamond films and high Tc superconductors. Complete problem sets are provided at the end of each chapter to facilitate self-study. Key Features * The first true textbook to provide broad coverage of thin films from processing to performance * Covers film materials used in microelectronics, magnetic applications, optics, and metallurgical and protective coatings * Includes chapters on epitaxy, surface modification using laser and ion beams, and emerging thin film materials and applications * Extensive treatment is given to chemical vapor deposition, diffusion and reactions, and stress in films * Provides complete exercise sets to facilitate study | ||
650 | 7 | |a Thin films |2 fast | |
650 | 4 | |a Thin films | |
650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |D s |
689 | 0 | |8 1\p |5 DE-604 | |
689 | 1 | 0 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
689 | 1 | |8 2\p |5 DE-604 | |
856 | 4 | 0 | |u https://doi.org/10.1016/C2009-0-22199-4 |x Verlag |3 Volltext |
912 | |a ZDB-33-ESD |a ZDB-33-RER | ||
940 | 1 | |q FAW_PDA_ESD | |
999 | |a oai:aleph.bib-bvb.de:BVB01-027744767 | ||
883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
966 | e | |u https://doi.org/10.1016/C2009-0-22199-4 |l FHI01 |p ZDB-33-RER |x Verlag |3 Volltext |
Datensatz im Suchindex
_version_ | 1804152893488496640 |
---|---|
any_adam_object | |
author | Ohring, Milton |
author_facet | Ohring, Milton |
author_role | aut |
author_sort | Ohring, Milton |
author_variant | m o mo |
building | Verbundindex |
bvnumber | BV042307775 |
classification_rvk | UP 7500 |
collection | ZDB-33-ESD ZDB-33-RER |
ctrlnum | (OCoLC)65196181 (DE-599)BVBBV042307775 |
dewey-full | 620.44 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 620 - Engineering and allied operations |
dewey-raw | 620.44 |
dewey-search | 620.44 |
dewey-sort | 3620.44 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Physik |
doi_str_mv | 10.1016/C2009-0-22199-4 |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03107nmm a2200505zc 4500</leader><controlfield tag="001">BV042307775</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20220728 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">150129s1991 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780080511184</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">978-0-08-051118-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">008051118X</subfield><subfield code="c">electronic bk.</subfield><subfield code="9">0-08-051118-X</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780125249904</subfield><subfield code="9">978-0-12-524990-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">012524990X</subfield><subfield code="9">0-12-524990-X</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1016/C2009-0-22199-4</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)65196181</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV042307775</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield><subfield code="a">DE-573</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.44</subfield><subfield code="2">20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7500</subfield><subfield code="0">(DE-625)146433:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Ohring, Milton</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">The Materials Science of Thin Films</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">San Diego</subfield><subfield code="b">Academic Press [Imprint]</subfield><subfield code="c">Dec. 1991</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (1 online resource)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">This is the first available textbook to provide comprehensive coverage of the science and technology of thin films and coatings. Developed for upper-level undergraduate and beginning graduate students, the book discusses physical and chemical vapor deposition processes; phenomena involving nucleation and growth, stress, diffusion and reaction; structural and chemical characterization techniques; and applications involving coatings, magnetic and optical recording materials, integrated optics, and quantum devices. The book includes chapters on epitaxy and surface modification in addition to discussing emerging technologies such as diamond films and high Tc superconductors. Complete problem sets are provided at the end of each chapter to facilitate self-study. Key Features * The first true textbook to provide broad coverage of thin films from processing to performance * Covers film materials used in microelectronics, magnetic applications, optics, and metallurgical and protective coatings * Includes chapters on epitaxy, surface modification using laser and ion beams, and emerging thin film materials and applications * Extensive treatment is given to chemical vapor deposition, diffusion and reactions, and stress in films * Provides complete exercise sets to facilitate study</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Thin films</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Thin films</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1016/C2009-0-22199-4</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield><subfield code="a">ZDB-33-RER</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">FAW_PDA_ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027744767</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1016/C2009-0-22199-4</subfield><subfield code="l">FHI01</subfield><subfield code="p">ZDB-33-RER</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
id | DE-604.BV042307775 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T01:17:57Z |
institution | BVB |
isbn | 9780080511184 008051118X 9780125249904 012524990X |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027744767 |
oclc_num | 65196181 |
open_access_boolean | |
owner | DE-1046 DE-573 |
owner_facet | DE-1046 DE-573 |
physical | 1 Online-Ressource (1 online resource) |
psigel | ZDB-33-ESD ZDB-33-RER FAW_PDA_ESD |
publishDate | 1991 |
publishDateSearch | 1991 |
publishDateSort | 1991 |
publisher | Academic Press [Imprint] |
record_format | marc |
spelling | Ohring, Milton Verfasser aut The Materials Science of Thin Films San Diego Academic Press [Imprint] Dec. 1991 1 Online-Ressource (1 online resource) txt rdacontent c rdamedia cr rdacarrier This is the first available textbook to provide comprehensive coverage of the science and technology of thin films and coatings. Developed for upper-level undergraduate and beginning graduate students, the book discusses physical and chemical vapor deposition processes; phenomena involving nucleation and growth, stress, diffusion and reaction; structural and chemical characterization techniques; and applications involving coatings, magnetic and optical recording materials, integrated optics, and quantum devices. The book includes chapters on epitaxy and surface modification in addition to discussing emerging technologies such as diamond films and high Tc superconductors. Complete problem sets are provided at the end of each chapter to facilitate self-study. Key Features * The first true textbook to provide broad coverage of thin films from processing to performance * Covers film materials used in microelectronics, magnetic applications, optics, and metallurgical and protective coatings * Includes chapters on epitaxy, surface modification using laser and ion beams, and emerging thin film materials and applications * Extensive treatment is given to chemical vapor deposition, diffusion and reactions, and stress in films * Provides complete exercise sets to facilitate study Thin films fast Thin films Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 s 1\p DE-604 Dünne Schicht (DE-588)4136925-7 s 2\p DE-604 https://doi.org/10.1016/C2009-0-22199-4 Verlag Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Ohring, Milton The Materials Science of Thin Films Thin films fast Thin films Dünne Schicht (DE-588)4136925-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
subject_GND | (DE-588)4136925-7 (DE-588)4136339-5 |
title | The Materials Science of Thin Films |
title_auth | The Materials Science of Thin Films |
title_exact_search | The Materials Science of Thin Films |
title_full | The Materials Science of Thin Films |
title_fullStr | The Materials Science of Thin Films |
title_full_unstemmed | The Materials Science of Thin Films |
title_short | The Materials Science of Thin Films |
title_sort | the materials science of thin films |
topic | Thin films fast Thin films Dünne Schicht (DE-588)4136925-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
topic_facet | Thin films Dünne Schicht Dünnschichttechnik |
url | https://doi.org/10.1016/C2009-0-22199-4 |
work_keys_str_mv | AT ohringmilton thematerialsscienceofthinfilms |