Organometallic vapor-phase epitaxy: theory and practice
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Bibliographic Details
Main Author: Stringfellow, G. B., (Gerald B.) (Author)
Format: Electronic eBook
Language:English
Published: San Diego Academic Press c1999
Edition:2nd ed
Subjects:
Online Access:Volltext
Item Description:This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices. Key Features * Updated with new emphasis on the semiconducting nitride materialsGaN and its alloys with In and Al * Emphasizes the newly understood aspects of surface processes * Contains a new chapter, as well as several new sections in chapters on thermodynamics and kinetics
Includes bibliographical references and index
Physical Description:1 Online-Ressource (xxiv, 572 p.)
ISBN:9780126738421
0126738424

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