Resistive switching in ZrO2 based metal-oxide-metal structures:
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Jülich
Forschungszentrum Jülich, Zentralbibliothek
2014
|
| Series: | Schriften des Forschungszentrums Jülich
Reihe Information ; 37 |
| Subjects: | |
| Online Access: | Inhaltstext Inhaltsverzeichnis |
| Physical Description: | XVIII, 125 S. Ill., graph. Darst. 24 cm |
| ISBN: | 9783893369713 |
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MARC
| LEADER | 00000nam a22000008cb4500 | ||
|---|---|---|---|
| 001 | BV042093629 | ||
| 003 | DE-604 | ||
| 007 | t | ||
| 008 | 140926s2014 gw ad|| m||| 00||| eng d | ||
| 015 | |a 14,N39 |2 dnb | ||
| 016 | 7 | |a 1058333666 |2 DE-101 | |
| 020 | |a 9783893369713 |c kart. : EUR 30.00 (DE), EUR 30.90 (AT), sfr 40.90 (freier Pr.) |9 978-3-89336-971-3 | ||
| 024 | 3 | |a 9783893369713 | |
| 035 | |a (OCoLC)891570430 | ||
| 035 | |a (DE-599)DNB1058333666 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c XA-DE-NW | ||
| 049 | |a DE-12 | ||
| 082 | 0 | |a 530.4175 |2 22/ger | |
| 084 | |a 500 |2 sdnb | ||
| 100 | 1 | |a Kärkkänen, Irina |e Verfasser |0 (DE-588)1054380864 |4 aut | |
| 245 | 1 | 0 | |a Resistive switching in ZrO2 based metal-oxide-metal structures |c Irina Kärkkänen |
| 264 | 1 | |a Jülich |b Forschungszentrum Jülich, Zentralbibliothek |c 2014 | |
| 300 | |a XVIII, 125 S. |b Ill., graph. Darst. |c 24 cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Schriften des Forschungszentrums Jülich : Reihe Information |v 37 | |
| 502 | |a Zugl.: Aachen, RWTH Aachen, Diss., 2014 | ||
| 650 | 0 | 7 | |a Übergangsmetalloxide |0 (DE-588)4186583-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nichtflüchtiger Speicher |0 (DE-588)4728810-3 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Nichtflüchtiger Speicher |0 (DE-588)4728810-3 |D s |
| 689 | 0 | 1 | |a Übergangsmetalloxide |0 (DE-588)4186583-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 830 | 0 | |a Schriften des Forschungszentrums Jülich |v Reihe Information ; 37 |w (DE-604)BV035800087 |9 37 | |
| 856 | 4 | 2 | |m X:MVB |q text/html |u http://deposit.dnb.de/cgi-bin/dokserv?id=4773628&prov=M&dok_var=1&dok_ext=htm |3 Inhaltstext |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027534440&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-027534440 | |
Record in the Search Index
| _version_ | 1809770402410397696 |
|---|---|
| adam_text |
CONTENTS
CONTENTS
ABSTRACT VII
KURZFASSUNG IX
INDEX OF ACRONYMS AND SYMBOLS XVII
1. INTRODUCTION 1
1.1 STATE-OF-THE-ART 3
1.2 SCOPE OF THIS WORK 7
2. FUNDAMENTALS 11
2.1. PRINCIPLES OF RESISTIVE SWITCHING 11
2.1.1 ELECTROFORMING 15
2.1.2 SWITCHING MECHANISMS 17
2.2 STRUCTURAL AND ELECTRICAL PROPERTIES OF ZR0
2
20
3. EXPERIMENTAL 25
3.1 ATOMIC LAYER DEPOSITION 25
3.1.1. PRECURSORS 26
3.1.2. ALD SETUP AND EXPERIMENTAL PROCEDURE IN UNIVERSITY OF HELSINKI 29
3.2 STRUCTURAL CHARACTERIZATION 30
3.2.1 X-RAY DIFFRACTION AND HIGH TEMPERATURE X-RAY DIFFRACTION (GIXRD,
HT-GIXRD). 30
3.2.2 X-RAY REFLECTIVITY (XRR) 31
3.2.3 X-RAY PHOTOELECTRON SPECTROSCOPY (XPS) 31
3.2.4 SECONDARY ION MASS SPECTROSCOPY (SIMS) 31
3.3 MORPHOLOGICAL CHARACTERIZATION 31
3.4 ELECTRICAL CHARACTERIZATION 31
3.4.1 MEASUREMENTS OF DIELECTRIC PROPERTIES 32
3.4.2 RESISTIVE SWITCHING MEASUREMENTS 32
3.4.3 IMPEDANCE SPECTROSCOPY 32
3.5 DEVICE FABRICATION 33
XIII
HTTP://D-NB.INFO/1058333666
CONTENTS
4. STRUCTURAL AND MORPHOLOGICAL CHARACTERIZATION OF THE THIN FILMS 35
4.1. STRUCTURAL PROPERTIES 35
4.1.1 FILM STRUCTURE ANALYZED BY GIXRD AND HT-GIXRD 35
4.1.2 ZR02/TI0
2
BILAYERS ON SI/PT SUBSTRATES 41
4.1.3 FILMS THICKNESS BY XRR 43
4.1.4 IMPURITY ANALYSES BY MEANS OF XPS 44
4.1.5 SIMS ANALYSES OF THE ZR0
2
FILMS 47
4.2. MORPHOLOGICAL CHARACTERIZATION OF ZR0
2
FILMS 48
4.2.1. AFM FOR ZR0
2
FILMS ON SI/SI0
2
48
4.2.2. SEM AND TEM FOR ZR0
2
FILMS ON PT/SI 49
4.3. DIELECTRIC PROPERTIES OF THE ZR0
2
FILMS AND THE ZR0
2
/TI0
2
BILAYERS 52
5. RESISTIVE SWITCHING OF THE ZR0
2
FILMS 55
5.1. THE EFFECT OF THE OXYGEN SOURCE ON THE RS PERFORMANCES OF
PT/ZRO^I/PT DEVICES. 55
5.2. EFFECT OF TI LAYER THICKNESS ON THE RESISTIVE SWITCHING PROPERTIES
OF PT/ZRO
2
(20 NM)/TI
/PT DEVICES 58
5.3. THE CLOSER INVESTIGATION OF THE DIFFERENCES IN THE UP AND BP
SWITCHING IN THE TEMA-
ZR/0
3
GROWN ZR0
2
FILM BASED DEVICES 62
5.3.1. TEMPERATURE DEPENDENCES OF THE ON AND OFF STATES 65
5.4. COMPARISON OF THE RS IN THE TEMA-ZR AND GUAN-ZR GROWN ZR0
2
BASED DEVICES 68
5.5. RESISTIVE SWITCHING IN THE ZR0
2
/TI0
2
BILAYERS 69
5.5.1. RESISTIVE SWITCHING IN THE ZR0
2
/TI0
2
AND TI0
2
/ZR0
2
BILAYERS INTEGRATED INTO
PT/BILAYER/TI(5 NM)/ PT DEVICES 70
5.5.2. RESISTIVE SWITCHING IN THE ZR0
2
/TI0
2
AND TI0
2
/ZR0
2
BILAYERS INTEGRATED INTO
PT/BILAYER/TI (40 NM)/PT DEVICES 71
6. IMPEDANCE SPECTROSCOPY 77
6.1. PRISTINE STATES 78
6.2. ON STATES 80
6.3. OFF STATES 83
6.4. BODE PLOTS 85
7. DIFFERENTIATING THE UP AND BP SWITCHING IN PT/ZRO^JEAE) DEVICES 87
7.1 EMPIRICAL MODEL OF RS IN PT/ZRO^THIN EAE) AND PT/ZRO^FTHICK EAE) 87
7.2 COMPARISON OF THE EMPIRICAL MODEL WITH THE EXPERIMENTAL RESULTS 92
7.2.1 DISCUSSION OF THE MICROSCOPIC SWITCHING MODEL OF THE PT/ZRO^LTHICK
EAE) DEVICES
94
XIV
CONTENTS
8. GENERAL CONCLUSIONS 101
LIST OF FIGURES 105
LIST OF TABLES ILL
BIBLIOGRAPHY 113
XV |
| any_adam_object | 1 |
| author | Kärkkänen, Irina |
| author_GND | (DE-588)1054380864 |
| author_facet | Kärkkänen, Irina |
| author_role | aut |
| author_sort | Kärkkänen, Irina |
| author_variant | i k ik |
| building | Verbundindex |
| bvnumber | BV042093629 |
| ctrlnum | (OCoLC)891570430 (DE-599)DNB1058333666 |
| dewey-full | 530.4175 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.4175 |
| dewey-search | 530.4175 |
| dewey-sort | 3530.4175 |
| dewey-tens | 530 - Physics |
| discipline | Physik Allgemeine Naturwissenschaft |
| format | Thesis Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a22000008cb4500</leader><controlfield tag="001">BV042093629</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">140926s2014 gw ad|| m||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">14,N39</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">1058333666</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783893369713</subfield><subfield code="c">kart. : EUR 30.00 (DE), EUR 30.90 (AT), sfr 40.90 (freier Pr.)</subfield><subfield code="9">978-3-89336-971-3</subfield></datafield><datafield tag="024" ind1="3" ind2=" "><subfield code="a">9783893369713</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)891570430</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)DNB1058333666</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">XA-DE-NW</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-12</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">530.4175</subfield><subfield code="2">22/ger</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">500</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kärkkänen, Irina</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)1054380864</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Resistive switching in ZrO2 based metal-oxide-metal structures</subfield><subfield code="c">Irina Kärkkänen</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Jülich</subfield><subfield code="b">Forschungszentrum Jülich, Zentralbibliothek</subfield><subfield code="c">2014</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVIII, 125 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield><subfield code="c">24 cm</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Schriften des Forschungszentrums Jülich : Reihe Information</subfield><subfield code="v">37</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Zugl.: Aachen, RWTH Aachen, Diss., 2014</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Übergangsmetalloxide</subfield><subfield code="0">(DE-588)4186583-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nichtflüchtiger Speicher</subfield><subfield code="0">(DE-588)4728810-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Nichtflüchtiger Speicher</subfield><subfield code="0">(DE-588)4728810-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Übergangsmetalloxide</subfield><subfield code="0">(DE-588)4186583-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Schriften des Forschungszentrums Jülich</subfield><subfield code="v">Reihe Information ; 37</subfield><subfield code="w">(DE-604)BV035800087</subfield><subfield code="9">37</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">X:MVB</subfield><subfield code="q">text/html</subfield><subfield code="u">http://deposit.dnb.de/cgi-bin/dokserv?id=4773628&prov=M&dok_var=1&dok_ext=htm</subfield><subfield code="3">Inhaltstext</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027534440&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027534440</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV042093629 |
| illustrated | Illustrated |
| indexdate | 2024-09-10T01:25:50Z |
| institution | BVB |
| isbn | 9783893369713 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027534440 |
| oclc_num | 891570430 |
| open_access_boolean | |
| owner | DE-12 |
| owner_facet | DE-12 |
| physical | XVIII, 125 S. Ill., graph. Darst. 24 cm |
| publishDate | 2014 |
| publishDateSearch | 2014 |
| publishDateSort | 2014 |
| publisher | Forschungszentrum Jülich, Zentralbibliothek |
| record_format | marc |
| series | Schriften des Forschungszentrums Jülich |
| series2 | Schriften des Forschungszentrums Jülich : Reihe Information |
| spelling | Kärkkänen, Irina Verfasser (DE-588)1054380864 aut Resistive switching in ZrO2 based metal-oxide-metal structures Irina Kärkkänen Jülich Forschungszentrum Jülich, Zentralbibliothek 2014 XVIII, 125 S. Ill., graph. Darst. 24 cm txt rdacontent n rdamedia nc rdacarrier Schriften des Forschungszentrums Jülich : Reihe Information 37 Zugl.: Aachen, RWTH Aachen, Diss., 2014 Übergangsmetalloxide (DE-588)4186583-2 gnd rswk-swf Nichtflüchtiger Speicher (DE-588)4728810-3 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Nichtflüchtiger Speicher (DE-588)4728810-3 s Übergangsmetalloxide (DE-588)4186583-2 s DE-604 Schriften des Forschungszentrums Jülich Reihe Information ; 37 (DE-604)BV035800087 37 X:MVB text/html http://deposit.dnb.de/cgi-bin/dokserv?id=4773628&prov=M&dok_var=1&dok_ext=htm Inhaltstext DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027534440&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Kärkkänen, Irina Resistive switching in ZrO2 based metal-oxide-metal structures Schriften des Forschungszentrums Jülich Übergangsmetalloxide (DE-588)4186583-2 gnd Nichtflüchtiger Speicher (DE-588)4728810-3 gnd |
| subject_GND | (DE-588)4186583-2 (DE-588)4728810-3 (DE-588)4113937-9 |
| title | Resistive switching in ZrO2 based metal-oxide-metal structures |
| title_auth | Resistive switching in ZrO2 based metal-oxide-metal structures |
| title_exact_search | Resistive switching in ZrO2 based metal-oxide-metal structures |
| title_full | Resistive switching in ZrO2 based metal-oxide-metal structures Irina Kärkkänen |
| title_fullStr | Resistive switching in ZrO2 based metal-oxide-metal structures Irina Kärkkänen |
| title_full_unstemmed | Resistive switching in ZrO2 based metal-oxide-metal structures Irina Kärkkänen |
| title_short | Resistive switching in ZrO2 based metal-oxide-metal structures |
| title_sort | resistive switching in zro2 based metal oxide metal structures |
| topic | Übergangsmetalloxide (DE-588)4186583-2 gnd Nichtflüchtiger Speicher (DE-588)4728810-3 gnd |
| topic_facet | Übergangsmetalloxide Nichtflüchtiger Speicher Hochschulschrift |
| url | http://deposit.dnb.de/cgi-bin/dokserv?id=4773628&prov=M&dok_var=1&dok_ext=htm http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=027534440&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV035800087 |
| work_keys_str_mv | AT karkkanenirina resistiveswitchinginzro2basedmetaloxidemetalstructures |