Special issue on atomic layer deposition:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
New York
American Inst. of Physics
2013
|
| Series: | Journal of vacuum science & technology : A
31,1 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zs.-Heftes |
| Physical Description: | Getr. Zählung |
Staff View
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Record in the Search Index
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:10:54Z |
| institution | BVB |
| language | English |
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| oclc_num | 889973581 |
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| owner_facet | DE-706 |
| physical | Getr. Zählung |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology : A |
| spelling | Special issue on atomic layer deposition New York American Inst. of Physics 2013 Getr. Zählung txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : A 31,1 Einzelaufnahme eines Zs.-Heftes Atomlagenabscheidung (DE-588)7712127-2 gnd rswk-swf Atomlagenabscheidung (DE-588)7712127-2 s DE-604 |
| spellingShingle | Special issue on atomic layer deposition Atomlagenabscheidung (DE-588)7712127-2 gnd |
| subject_GND | (DE-588)7712127-2 |
| title | Special issue on atomic layer deposition |
| title_auth | Special issue on atomic layer deposition |
| title_exact_search | Special issue on atomic layer deposition |
| title_full | Special issue on atomic layer deposition |
| title_fullStr | Special issue on atomic layer deposition |
| title_full_unstemmed | Special issue on atomic layer deposition |
| title_short | Special issue on atomic layer deposition |
| title_sort | special issue on atomic layer deposition |
| topic | Atomlagenabscheidung (DE-588)7712127-2 gnd |
| topic_facet | Atomlagenabscheidung |