Principles of lithography:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE Press
2010
|
| Ausgabe: | 3. ed. |
| Schriftenreihe: | SPIE Press monograph
198 |
| Schlagworte: | |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | XIV, 504 S. Ill., graph. Darst. |
| ISBN: | 9780819483249 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV042016025 | ||
| 003 | DE-604 | ||
| 005 | 20141014 | ||
| 007 | t | ||
| 008 | 140807s2010 ad|| |||| 00||| eng d | ||
| 010 | |a 2010026775 | ||
| 020 | |a 9780819483249 |9 978-0-8194-8324-9 | ||
| 035 | |a (OCoLC)845815663 | ||
| 035 | |a (DE-599)GBV631522271 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-83 | ||
| 082 | 0 | |a 621.381531 | |
| 084 | |a ZN 4170 |0 (DE-625)157366: |2 rvk | ||
| 100 | 1 | |a Levinson, Harry J. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Principles of lithography |c Harry J. Levinson |
| 250 | |a 3. ed. | ||
| 264 | 1 | |a Bellingham, Wash. |b SPIE Press |c 2010 | |
| 300 | |a XIV, 504 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a SPIE Press monograph |v 198 | |
| 500 | |a Includes bibliographical references and index | ||
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 830 | 0 | |a SPIE Press monograph |v 198 |w (DE-604)BV011462585 |9 198 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-027457811 | ||
Datensatz im Suchindex
| _version_ | 1804152431068577792 |
|---|---|
| any_adam_object | |
| author | Levinson, Harry J. |
| author_facet | Levinson, Harry J. |
| author_role | aut |
| author_sort | Levinson, Harry J. |
| author_variant | h j l hj hjl |
| building | Verbundindex |
| bvnumber | BV042016025 |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)845815663 (DE-599)GBV631522271 |
| dewey-full | 621.381531 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381531 |
| dewey-search | 621.381531 |
| dewey-sort | 3621.381531 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 3. ed. |
| format | Book |
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| id | DE-604.BV042016025 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T01:10:36Z |
| institution | BVB |
| isbn | 9780819483249 |
| language | English |
| lccn | 2010026775 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027457811 |
| oclc_num | 845815663 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | XIV, 504 S. Ill., graph. Darst. |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | SPIE Press |
| record_format | marc |
| series | SPIE Press monograph |
| series2 | SPIE Press monograph |
| spelling | Levinson, Harry J. Verfasser aut Principles of lithography Harry J. Levinson 3. ed. Bellingham, Wash. SPIE Press 2010 XIV, 504 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier SPIE Press monograph 198 Includes bibliographical references and index Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 SPIE Press monograph 198 (DE-604)BV011462585 198 |
| spellingShingle | Levinson, Harry J. Principles of lithography SPIE Press monograph Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 |
| title | Principles of lithography |
| title_auth | Principles of lithography |
| title_exact_search | Principles of lithography |
| title_full | Principles of lithography Harry J. Levinson |
| title_fullStr | Principles of lithography Harry J. Levinson |
| title_full_unstemmed | Principles of lithography Harry J. Levinson |
| title_short | Principles of lithography |
| title_sort | principles of lithography |
| topic | Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lithografie Halbleitertechnologie |
| volume_link | (DE-604)BV011462585 |
| work_keys_str_mv | AT levinsonharryj principlesoflithography |