Computational lithography:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Hoboken, N.J.
Wiley
c2010
|
| Series: | Wiley series in pure and applied optics
|
| Subjects: | |
| Online Access: | Volltext |
| Item Description: | Includes bibliographical references (p. 217-222) and index |
| Physical Description: | 1 Online-Ressource (xv, 226 p.) |
| ISBN: | 9781282755963 |
Staff View
MARC
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| 650 | 4 | |a Microlithography / Mathematics | |
| 650 | 4 | |a Integrated circuits / Design and construction / Mathematics | |
| 650 | 4 | |a Photolithography / Mathematics | |
| 650 | 4 | |a Semiconductors / Etching / Mathematics | |
| 650 | 4 | |a Resolution (Optics) | |
| 700 | 1 | |a Arce, Gonzalo R. |e Sonstige |4 oth | |
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Record in the Search Index
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| any_adam_object | |
| author | Ma, Xu |
| author_facet | Ma, Xu |
| author_role | aut |
| author_sort | Ma, Xu |
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| dewey-hundreds | 600 - Technology (Applied sciences) |
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| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV041910183 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T01:08:04Z |
| institution | BVB |
| isbn | 9781282755963 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027353853 |
| oclc_num | 689995793 |
| open_access_boolean | |
| physical | 1 Online-Ressource (xv, 226 p.) |
| psigel | ZDB-26-MYL |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | Wiley |
| record_format | marc |
| series2 | Wiley series in pure and applied optics |
| spelling | Ma, Xu Verfasser aut Computational lithography Xu Ma and Gonzalo R. Arce Hoboken, N.J. Wiley c2010 1 Online-Ressource (xv, 226 p.) txt rdacontent c rdamedia cr rdacarrier Wiley series in pure and applied optics Includes bibliographical references (p. 217-222) and index Mathematik Microlithography / Mathematics Integrated circuits / Design and construction / Mathematics Photolithography / Mathematics Semiconductors / Etching / Mathematics Resolution (Optics) Arce, Gonzalo R. Sonstige oth Erscheint auch als Druck-Ausgabe, Hardcover 978-0-470-59697-5 Erscheint auch als Druck-Ausgabe, Hardcover 0-470-59697-X http://lib.myilibrary.com?id=275596 Aggregator Volltext |
| spellingShingle | Ma, Xu Computational lithography Mathematik Microlithography / Mathematics Integrated circuits / Design and construction / Mathematics Photolithography / Mathematics Semiconductors / Etching / Mathematics Resolution (Optics) |
| title | Computational lithography |
| title_auth | Computational lithography |
| title_exact_search | Computational lithography |
| title_full | Computational lithography Xu Ma and Gonzalo R. Arce |
| title_fullStr | Computational lithography Xu Ma and Gonzalo R. Arce |
| title_full_unstemmed | Computational lithography Xu Ma and Gonzalo R. Arce |
| title_short | Computational lithography |
| title_sort | computational lithography |
| topic | Mathematik Microlithography / Mathematics Integrated circuits / Design and construction / Mathematics Photolithography / Mathematics Semiconductors / Etching / Mathematics Resolution (Optics) |
| topic_facet | Mathematik Microlithography / Mathematics Integrated circuits / Design and construction / Mathematics Photolithography / Mathematics Semiconductors / Etching / Mathematics Resolution (Optics) |
| url | http://lib.myilibrary.com?id=275596 |
| work_keys_str_mv | AT maxu computationallithography AT arcegonzalor computationallithography |