Papers from the 25th International Vacuum Nanoelectronics Conference: 9-13 July 2012, Jeju, South Korea
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York, NY
American Inst. of Physics
2013
|
| Series: | Journal of vacuum science & technology
B, Nanotechnology and microelectronics ; 31,2 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-Heftes |
| Physical Description: | Getr. Zählung Ill., graph. Darst. |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV041858101 | ||
| 003 | DE-604 | ||
| 005 | 20140602 | ||
| 007 | t | ||
| 008 | 140521s2013 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)880807409 | ||
| 035 | |a (DE-599)BVBBV041858101 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-384 |a DE-706 | ||
| 084 | |a UA 1000 |0 (DE-625)145215: |2 rvk | ||
| 111 | 2 | |a International Vacuum Nanoelectronics Conference |n 25 |d 2012 |c Jeju |j Verfasser |0 (DE-588)1051390273 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 25th International Vacuum Nanoelectronics Conference |b 9-13 July 2012, Jeju, South Korea |c conference chair: Cheol Jin Lee |
| 264 | 1 | |a New York, NY |b American Inst. of Physics |c 2013 | |
| 300 | |a Getr. Zählung |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Journal of vacuum science & technology : B, Nanotechnology and microelectronics |v 31,2 | |
| 500 | |a Einzelaufnahme eines Zeitschr.-Heftes | ||
| 650 | 0 | 7 | |a Nanoelektronik |0 (DE-588)4732034-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Vakuum |0 (DE-588)4062266-6 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2012 |z Cheju |2 gnd-content | |
| 689 | 0 | 0 | |a Nanoelektronik |0 (DE-588)4732034-5 |D s |
| 689 | 0 | 1 | |a Vakuum |0 (DE-588)4062266-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Lee, Cheol Jin |e Sonstige |4 oth | |
| 830 | 0 | |a Journal of vacuum science & technology |v B, Nanotechnology and microelectronics ; 31,2 |w (DE-604)BV002583087 |9 31,2 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-027302396 | ||
Record in the Search Index
| _version_ | 1804152208490496000 |
|---|---|
| any_adam_object | |
| author_corporate | International Vacuum Nanoelectronics Conference Jeju |
| author_corporate_role | aut |
| author_facet | International Vacuum Nanoelectronics Conference Jeju |
| author_sort | International Vacuum Nanoelectronics Conference Jeju |
| building | Verbundindex |
| bvnumber | BV041858101 |
| classification_rvk | UA 1000 |
| ctrlnum | (OCoLC)880807409 (DE-599)BVBBV041858101 |
| discipline | Physik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01549nam a2200373 cb4500</leader><controlfield tag="001">BV041858101</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20140602 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">140521s2013 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)880807409</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV041858101</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield><subfield code="a">DE-706</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UA 1000</subfield><subfield code="0">(DE-625)145215:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Vacuum Nanoelectronics Conference</subfield><subfield code="n">25</subfield><subfield code="d">2012</subfield><subfield code="c">Jeju</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)1051390273</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the 25th International Vacuum Nanoelectronics Conference</subfield><subfield code="b">9-13 July 2012, Jeju, South Korea</subfield><subfield code="c">conference chair: Cheol Jin Lee</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York, NY</subfield><subfield code="b">American Inst. of Physics</subfield><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">Getr. Zählung</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Journal of vacuum science & technology : B, Nanotechnology and microelectronics</subfield><subfield code="v">31,2</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zeitschr.-Heftes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanoelektronik</subfield><subfield code="0">(DE-588)4732034-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Vakuum</subfield><subfield code="0">(DE-588)4062266-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2012</subfield><subfield code="z">Cheju</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Nanoelektronik</subfield><subfield code="0">(DE-588)4732034-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Vakuum</subfield><subfield code="0">(DE-588)4062266-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Lee, Cheol Jin</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Journal of vacuum science & technology</subfield><subfield code="v">B, Nanotechnology and microelectronics ; 31,2</subfield><subfield code="w">(DE-604)BV002583087</subfield><subfield code="9">31,2</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-027302396</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 2012 Cheju gnd-content |
| genre_facet | Konferenzschrift 2012 Cheju |
| id | DE-604.BV041858101 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T01:07:04Z |
| institution | BVB |
| institution_GND | (DE-588)1051390273 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027302396 |
| oclc_num | 880807409 |
| open_access_boolean | |
| owner | DE-384 DE-706 |
| owner_facet | DE-384 DE-706 |
| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | American Inst. of Physics |
| record_format | marc |
| series | Journal of vacuum science & technology |
| series2 | Journal of vacuum science & technology : B, Nanotechnology and microelectronics |
| spelling | International Vacuum Nanoelectronics Conference 25 2012 Jeju Verfasser (DE-588)1051390273 aut Papers from the 25th International Vacuum Nanoelectronics Conference 9-13 July 2012, Jeju, South Korea conference chair: Cheol Jin Lee New York, NY American Inst. of Physics 2013 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : B, Nanotechnology and microelectronics 31,2 Einzelaufnahme eines Zeitschr.-Heftes Nanoelektronik (DE-588)4732034-5 gnd rswk-swf Vakuum (DE-588)4062266-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2012 Cheju gnd-content Nanoelektronik (DE-588)4732034-5 s Vakuum (DE-588)4062266-6 s DE-604 Lee, Cheol Jin Sonstige oth Journal of vacuum science & technology B, Nanotechnology and microelectronics ; 31,2 (DE-604)BV002583087 31,2 |
| spellingShingle | Papers from the 25th International Vacuum Nanoelectronics Conference 9-13 July 2012, Jeju, South Korea Journal of vacuum science & technology Nanoelektronik (DE-588)4732034-5 gnd Vakuum (DE-588)4062266-6 gnd |
| subject_GND | (DE-588)4732034-5 (DE-588)4062266-6 (DE-588)1071861417 |
| title | Papers from the 25th International Vacuum Nanoelectronics Conference 9-13 July 2012, Jeju, South Korea |
| title_auth | Papers from the 25th International Vacuum Nanoelectronics Conference 9-13 July 2012, Jeju, South Korea |
| title_exact_search | Papers from the 25th International Vacuum Nanoelectronics Conference 9-13 July 2012, Jeju, South Korea |
| title_full | Papers from the 25th International Vacuum Nanoelectronics Conference 9-13 July 2012, Jeju, South Korea conference chair: Cheol Jin Lee |
| title_fullStr | Papers from the 25th International Vacuum Nanoelectronics Conference 9-13 July 2012, Jeju, South Korea conference chair: Cheol Jin Lee |
| title_full_unstemmed | Papers from the 25th International Vacuum Nanoelectronics Conference 9-13 July 2012, Jeju, South Korea conference chair: Cheol Jin Lee |
| title_short | Papers from the 25th International Vacuum Nanoelectronics Conference |
| title_sort | papers from the 25th international vacuum nanoelectronics conference 9 13 july 2012 jeju south korea |
| title_sub | 9-13 July 2012, Jeju, South Korea |
| topic | Nanoelektronik (DE-588)4732034-5 gnd Vakuum (DE-588)4062266-6 gnd |
| topic_facet | Nanoelektronik Vakuum Konferenzschrift 2012 Cheju |
| volume_link | (DE-604)BV002583087 |
| work_keys_str_mv | AT internationalvacuumnanoelectronicsconferencejeju papersfromthe25thinternationalvacuumnanoelectronicsconference913july2012jejusouthkorea AT leecheoljin papersfromthe25thinternationalvacuumnanoelectronicsconference913july2012jejusouthkorea |