Microcircuit Engineering 88: proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria
Saved in:
| Other Authors: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Amsterdam [u.a.]
North-Holland
1989
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| Subjects: | |
| Item Description: | Repr. from Microelectronic Engineering 9.1989 |
| Physical Description: | 653 S. Ill 27 cm |
| ISBN: | 0444874488 |
Staff View
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| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1988 Wien gnd-content |
| genre_facet | Konferenzschrift 1988 Wien |
| id | DE-604.BV041773531 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T01:05:04Z |
| institution | BVB |
| institution_GND | (DE-588)1220225-3 |
| isbn | 0444874488 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027219469 |
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| owner_facet | DE-91 DE-BY-TUM |
| physical | 653 S. Ill 27 cm |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | North-Holland |
| record_format | marc |
| spelling | Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria ed. by F. Paschke ; W. Fallmann and H. Löschner Amsterdam [u.a.] North-Holland 1989 653 S. Ill 27 cm txt rdacontent n rdamedia nc rdacarrier Repr. from Microelectronic Engineering 9.1989 Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 Wien gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Paschke, Fritz edt International Conference on Microlithography 14 1988 Wien Sonstige (DE-588)1220225-3 oth |
| spellingShingle | Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)1071861417 |
| title | Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria |
| title_auth | Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria |
| title_exact_search | Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria |
| title_full | Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria ed. by F. Paschke ; W. Fallmann and H. Löschner |
| title_fullStr | Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria ed. by F. Paschke ; W. Fallmann and H. Löschner |
| title_full_unstemmed | Microcircuit Engineering 88 proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria ed. by F. Paschke ; W. Fallmann and H. Löschner |
| title_short | Microcircuit Engineering 88 |
| title_sort | microcircuit engineering 88 proceedings of the international conference on microlithography september 20 22 1988 vienna austria |
| title_sub | proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria |
| topic | Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lithografie Halbleitertechnologie Konferenzschrift 1988 Wien |
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