Paschke, F. (1989). Microcircuit Engineering 88: Proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria. North-Holland.
Chicago Style (17th ed.) CitationPaschke, Fritz. Microcircuit Engineering 88: Proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria. Amsterdam [u.a.]: North-Holland, 1989.
MLA (9th ed.) CitationPaschke, Fritz. Microcircuit Engineering 88: Proceedings of the International Conference on Microlithography, September 20 - 22, 1988, Vienna, Austria. North-Holland, 1989.
Warning: These citations may not always be 100% accurate.