Silicon carbide microsystems for harsh environments:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York
Springer
c2011
|
| Series: | MEMS reference shelf
|
| Subjects: | |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | XV, 232 S. Ill., graph. Darst. 24 cm |
| ISBN: | 1441971203 9781441971203 |
Staff View
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| author_facet | Wijesundara, Muthu B. J. |
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| id | DE-604.BV041618635 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T01:01:01Z |
| institution | BVB |
| isbn | 1441971203 9781441971203 |
| language | English |
| lccn | 2011928695 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-027059716 |
| oclc_num | 746178309 |
| open_access_boolean | |
| owner | DE-859 |
| owner_facet | DE-859 |
| physical | XV, 232 S. Ill., graph. Darst. 24 cm |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Springer |
| record_format | marc |
| series2 | MEMS reference shelf |
| spelling | Wijesundara, Muthu B. J. Verfasser aut Silicon carbide microsystems for harsh environments Muthu B.J. Wijesundara, Robert G. Azevedo New York Springer c2011 XV, 232 S. Ill., graph. Darst. 24 cm txt rdacontent n rdamedia nc rdacarrier MEMS reference shelf Includes bibliographical references and index Microelectromechanical systems Silicon carbide Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Siliciumcarbid (DE-588)4055009-6 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Siliciumcarbid (DE-588)4055009-6 s DE-604 Azevedo, Robert G. Sonstige oth Erscheint auch als Online-Ausgabe 1-441-97121-1 Erscheint auch als Online-Ausgabe 978-1-441-97121-0 |
| spellingShingle | Wijesundara, Muthu B. J. Silicon carbide microsystems for harsh environments Microelectromechanical systems Silicon carbide Mikrosystemtechnik (DE-588)4221617-5 gnd Siliciumcarbid (DE-588)4055009-6 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)4055009-6 |
| title | Silicon carbide microsystems for harsh environments |
| title_auth | Silicon carbide microsystems for harsh environments |
| title_exact_search | Silicon carbide microsystems for harsh environments |
| title_full | Silicon carbide microsystems for harsh environments Muthu B.J. Wijesundara, Robert G. Azevedo |
| title_fullStr | Silicon carbide microsystems for harsh environments Muthu B.J. Wijesundara, Robert G. Azevedo |
| title_full_unstemmed | Silicon carbide microsystems for harsh environments Muthu B.J. Wijesundara, Robert G. Azevedo |
| title_short | Silicon carbide microsystems for harsh environments |
| title_sort | silicon carbide microsystems for harsh environments |
| topic | Microelectromechanical systems Silicon carbide Mikrosystemtechnik (DE-588)4221617-5 gnd Siliciumcarbid (DE-588)4055009-6 gnd |
| topic_facet | Microelectromechanical systems Silicon carbide Mikrosystemtechnik Siliciumcarbid |
| work_keys_str_mv | AT wijesundaramuthubj siliconcarbidemicrosystemsforharshenvironments AT azevedorobertg siliconcarbidemicrosystemsforharshenvironments |