Introduction to semiconductor manufacturing technology:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE Press
2012
|
| Edition: | 2. ed. |
| Subjects: | |
| Online Access: | Volltext |
| Physical Description: | 1 Online-Ressource (664 p.) Ill., graph. Darst. |
| ISBN: | 9781628701043 9780819490926 |
Staff View
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Record in the Search Index
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| any_adam_object | |
| author | Xiao, Hong |
| author_facet | Xiao, Hong |
| author_role | aut |
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| bvnumber | BV041550780 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85. |
| callnumber-search | TK7871.85. |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 2800 ZN 4100 ZN 4800 |
| collection | ZDB-10-ESC |
| ctrlnum | (OCoLC)841758999 (DE-599)BVBBV041550780 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2. ed. |
| format | Electronic eBook |
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| id | DE-604.BV041550780 |
| illustrated | Illustrated |
| indexdate | 2024-07-31T01:10:28Z |
| institution | BVB |
| isbn | 9781628701043 9780819490926 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-026996527 |
| oclc_num | 841758999 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | 1 Online-Ressource (664 p.) Ill., graph. Darst. |
| psigel | ZDB-10-ESC |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | SPIE Press |
| record_format | marc |
| spelling | Xiao, Hong Verfasser aut Introduction to semiconductor manufacturing technology Hong Xiao 2. ed. Bellingham, Wash. SPIE Press 2012 1 Online-Ressource (664 p.) Ill., graph. Darst. txt rdacontent c rdamedia cr rdacarrier Semiconductor industry Semiconductors Design and construction Halbleiter (DE-588)4022993-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s DE-604 Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s http://app.knovel.com/web/toc.v/cid:kpISTE0002/viewerType:toc/root_slug:introduction-semiconductor Volltext |
| spellingShingle | Xiao, Hong Introduction to semiconductor manufacturing technology Semiconductor industry Semiconductors Design and construction Halbleiter (DE-588)4022993-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Fertigung (DE-588)4016899-2 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4158814-9 (DE-588)4016899-2 |
| title | Introduction to semiconductor manufacturing technology |
| title_auth | Introduction to semiconductor manufacturing technology |
| title_exact_search | Introduction to semiconductor manufacturing technology |
| title_full | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_fullStr | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_full_unstemmed | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_short | Introduction to semiconductor manufacturing technology |
| title_sort | introduction to semiconductor manufacturing technology |
| topic | Semiconductor industry Semiconductors Design and construction Halbleiter (DE-588)4022993-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Fertigung (DE-588)4016899-2 gnd |
| topic_facet | Semiconductor industry Semiconductors Design and construction Halbleiter Halbleitertechnologie Fertigung |
| url | http://app.knovel.com/web/toc.v/cid:kpISTE0002/viewerType:toc/root_slug:introduction-semiconductor |
| work_keys_str_mv | AT xiaohong introductiontosemiconductormanufacturingtechnology |