APA (7th ed.) Citation

Xiao, H. (2012). Introduction to semiconductor manufacturing technology (2. ed.). SPIE Press.

Chicago Style (17th ed.) Citation

Xiao, Hong. Introduction to Semiconductor Manufacturing Technology. 2. ed. Bellingham, Wash: SPIE Press, 2012.

MLA (9th ed.) Citation

Xiao, Hong. Introduction to Semiconductor Manufacturing Technology. 2. ed. SPIE Press, 2012.