APA-Zitierstil (7. Ausg.)

Xiao, H. (2012). Introduction to semiconductor manufacturing technology (2. ed.). SPIE Press.

Chicago-Zitierstil (17. Ausg.)

Xiao, Hong. Introduction to Semiconductor Manufacturing Technology. 2. ed. Bellingham, Wash: SPIE Press, 2012.

MLA-Zitierstil (9. Ausg.)

Xiao, Hong. Introduction to Semiconductor Manufacturing Technology. 2. ed. SPIE Press, 2012.