24th IEEE International Conference on Micro Electro Mechanical Systems, Cancun, Mexico, 23 - 27 January 2011: based upon contributions revised from the technical digest of ... (MEMS-11)
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Bibliographic Details
Corporate Author: International Conference on Micro Electro Mechanical Systems Cancún (Author)
Format: Conference Proceeding Book
Language:English
Published: Amsterdam [u.a.] Elsevier 2012
Series:Sensors and actuators : A, Physical 177 : Special issue
Subjects:
Item Description:Einzelaufnahme eines Zs.-Heftes
Physical Description:114 S. Ill., graph. Darst.

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