Handbook of thin film deposition: tehniques, processes, and technologies
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Amsterdam [u.a.]
Elsevier
2012
|
| Ausgabe: | 3. ed. |
| Schlagworte: | |
| Beschreibung: | XVIII, 392 S. Ill., graph. Darst. |
| ISBN: | 9781437778731 1437778739 |
Internformat
MARC
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| 020 | |a 1437778739 |9 1-437-77873-9 | ||
| 035 | |a (OCoLC)806271497 | ||
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| 245 | 1 | 0 | |a Handbook of thin film deposition |b tehniques, processes, and technologies |c ed. by Krishna Seshan |
| 250 | |a 3. ed. | ||
| 264 | 1 | |a Amsterdam [u.a.] |b Elsevier |c 2012 | |
| 300 | |a XVIII, 392 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a PVD-Verfahren |0 (DE-588)4115673-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a CVD-Verfahren |0 (DE-588)4009846-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fertigung |0 (DE-588)4016899-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Integrierte Schaltung |0 (DE-588)4027242-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |2 gnd |9 rswk-swf |
| 653 | |a Thin films | ||
| 653 | |a Thin film devices / Design and construction | ||
| 655 | 7 | |8 1\p |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
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| 689 | 2 | |8 3\p |5 DE-604 | |
| 700 | 1 | |a Seshan, Krishna |4 edt | |
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Datensatz im Suchindex
| _version_ | 1804151477542846464 |
|---|---|
| any_adam_object | |
| author2 | Seshan, Krishna |
| author2_role | edt |
| author2_variant | k s ks |
| author_facet | Seshan, Krishna |
| building | Verbundindex |
| bvnumber | BV041381500 |
| classification_rvk | ZN 4150 |
| ctrlnum | (OCoLC)806271497 (DE-599)BSZ371077796 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 3. ed. |
| format | Book |
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| genre | 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV041381500 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:55:26Z |
| institution | BVB |
| isbn | 9781437778731 1437778739 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-026829463 |
| oclc_num | 806271497 |
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| owner | DE-634 |
| owner_facet | DE-634 |
| physical | XVIII, 392 S. Ill., graph. Darst. |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | Elsevier |
| record_format | marc |
| spelling | Handbook of thin film deposition tehniques, processes, and technologies ed. by Krishna Seshan 3. ed. Amsterdam [u.a.] Elsevier 2012 XVIII, 392 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Halbleiter (DE-588)4022993-2 gnd rswk-swf Fotovoltaik (DE-588)4121476-6 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf PVD-Verfahren (DE-588)4115673-0 gnd rswk-swf CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Thin films Thin film devices / Design and construction 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content Dünnschichttechnik (DE-588)4136339-5 s CVD-Verfahren (DE-588)4009846-1 s PVD-Verfahren (DE-588)4115673-0 s Halbleiter (DE-588)4022993-2 s Fotovoltaik (DE-588)4121476-6 s DE-604 Integrierte Schaltung (DE-588)4027242-4 s Fertigung (DE-588)4016899-2 s 2\p DE-604 Halbleitertechnologie (DE-588)4158814-9 s 3\p DE-604 Seshan, Krishna edt 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of thin film deposition tehniques, processes, and technologies Halbleiter (DE-588)4022993-2 gnd Fotovoltaik (DE-588)4121476-6 gnd Halbleitertechnologie (DE-588)4158814-9 gnd PVD-Verfahren (DE-588)4115673-0 gnd CVD-Verfahren (DE-588)4009846-1 gnd Fertigung (DE-588)4016899-2 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4121476-6 (DE-588)4158814-9 (DE-588)4115673-0 (DE-588)4009846-1 (DE-588)4016899-2 (DE-588)4027242-4 (DE-588)4136339-5 (DE-588)4143413-4 |
| title | Handbook of thin film deposition tehniques, processes, and technologies |
| title_auth | Handbook of thin film deposition tehniques, processes, and technologies |
| title_exact_search | Handbook of thin film deposition tehniques, processes, and technologies |
| title_full | Handbook of thin film deposition tehniques, processes, and technologies ed. by Krishna Seshan |
| title_fullStr | Handbook of thin film deposition tehniques, processes, and technologies ed. by Krishna Seshan |
| title_full_unstemmed | Handbook of thin film deposition tehniques, processes, and technologies ed. by Krishna Seshan |
| title_short | Handbook of thin film deposition |
| title_sort | handbook of thin film deposition tehniques processes and technologies |
| title_sub | tehniques, processes, and technologies |
| topic | Halbleiter (DE-588)4022993-2 gnd Fotovoltaik (DE-588)4121476-6 gnd Halbleitertechnologie (DE-588)4158814-9 gnd PVD-Verfahren (DE-588)4115673-0 gnd CVD-Verfahren (DE-588)4009846-1 gnd Fertigung (DE-588)4016899-2 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| topic_facet | Halbleiter Fotovoltaik Halbleitertechnologie PVD-Verfahren CVD-Verfahren Fertigung Integrierte Schaltung Dünnschichttechnik Aufsatzsammlung |
| work_keys_str_mv | AT seshankrishna handbookofthinfilmdepositiontehniquesprocessesandtechnologies |