MEMS: fundamental technology and applications
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Boca Raton u.a.
CRC Press
2013
|
| Series: | Devices, circuits, and systems
|
| Subjects: | |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | XXII, 456 S. Ill., graph. Darst. |
| ISBN: | 9781466515819 |
Staff View
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Record in the Search Index
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| ctrlnum | (OCoLC)854743613 (DE-599)BVBBV041109799 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV041109799 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T00:39:51Z |
| institution | BVB |
| isbn | 9781466515819 |
| language | English |
| lccn | 2013001258 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-026086027 |
| oclc_num | 854743613 |
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| owner | DE-1050 DE-573 |
| owner_facet | DE-1050 DE-573 |
| physical | XXII, 456 S. Ill., graph. Darst. |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | CRC Press |
| record_format | marc |
| series2 | Devices, circuits, and systems |
| spelling | MEMS fundamental technology and applications ed. by Vikas Choudhary ... Boca Raton u.a. CRC Press 2013 XXII, 456 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Devices, circuits, and systems Includes bibliographical references and index Medizin Microelectromechanical systems Microelectronic packaging MEDICAL / Biotechnology bisacsh TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS bisacsh MEMS (DE-588)4824724-8 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s DE-604 MEMS (DE-588)4824724-8 s 1\p DE-604 Choudhary, Vikas Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | MEMS fundamental technology and applications Medizin Microelectromechanical systems Microelectronic packaging MEDICAL / Biotechnology bisacsh TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS bisacsh MEMS (DE-588)4824724-8 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4824724-8 (DE-588)4221617-5 |
| title | MEMS fundamental technology and applications |
| title_auth | MEMS fundamental technology and applications |
| title_exact_search | MEMS fundamental technology and applications |
| title_full | MEMS fundamental technology and applications ed. by Vikas Choudhary ... |
| title_fullStr | MEMS fundamental technology and applications ed. by Vikas Choudhary ... |
| title_full_unstemmed | MEMS fundamental technology and applications ed. by Vikas Choudhary ... |
| title_short | MEMS |
| title_sort | mems fundamental technology and applications |
| title_sub | fundamental technology and applications |
| topic | Medizin Microelectromechanical systems Microelectronic packaging MEDICAL / Biotechnology bisacsh TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS bisacsh MEMS (DE-588)4824724-8 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Medizin Microelectromechanical systems Microelectronic packaging MEDICAL / Biotechnology TECHNOLOGY & ENGINEERING / Electronics / Circuits / General TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS MEMS Mikrosystemtechnik |
| work_keys_str_mv | AT choudharyvikas memsfundamentaltechnologyandapplications |