Injector and Vacuum Pump in MEMS for a Micro Mass Spectrometer:
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Bibliographic Details
Main Author: Ramírez Wong, Régulo Miguel 1983- (Author)
Format: Thesis Book
Language:English
Published: München Dr. Hut 2013
Edition:1. Aufl.
Series:Mikrosystemtechnik
Subjects:
Online Access:Inhaltstext
Physical Description:V, 139 S. Ill., graph. Darst. 210 mm x 148 mm, 233 g
ISBN:9783843908665
3843908664

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